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Acta Optica Sinica, Volume. 38, Issue 11, 1105002(2018)

Design of Small-Size High Resolution Echelle Grating Spectrometer with Divided Spectral Coverage

Haixia Cao1,2、*, Yingfei Zhao2, Miao He1,2, Weidong Wang2, and Chao Wang3
Author Affiliations
  • 1 Central Iron & Steel Research Institute, Beijing 100081, China;
  • 2 NCS Testing Technology Co., Ltd., Beijing 100094, China
  • 3 Institute of Space Electro Optical Technology, Changchun University of Science and Technology, Changchun, Jilin 130022, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (10)
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    Figures & Tables(10)
    Schematic of conical diffraction of echelle grating

    Fig. 1. Schematic of conical diffraction of echelle grating

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    Schematic of prism dispersion

    Fig. 2. Schematic of prism dispersion

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    Schematic of beam passing through double-slit and collimating mirror

    Fig. 3. Schematic of beam passing through double-slit and collimating mirror

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    Flow chart of structure parameters, usage parameters of prism, and double-slit interval design

    Fig. 4. Flow chart of structure parameters, usage parameters of prism, and double-slit interval design

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    Schematic of optical path configuration. (a) 210-800 nm; (b) 165-230 nm

    Fig. 5. Schematic of optical path configuration. (a) 210-800 nm; (b) 165-230 nm

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    Spot diagrams of simulated spectral lines for different reference wavelengths. (a) 799 nm; (b) 275.8 nm; (c) 226.8 nm; (d) 200 nm; (e) 185.85 nm; (f) 165 nm

    Fig. 6. Spot diagrams of simulated spectral lines for different reference wavelengths. (a) 799 nm; (b) 275.8 nm; (c) 226.8 nm; (d) 200 nm; (e) 185.85 nm; (f) 165 nm

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    Simulated aberration curves for different reference wavelengths.(a) 799 nm; (b) 275.8 nm; (c) 226.8 nm; (d) 200 nm; (e) 185.85 nm; (f) 165 nm

    Fig. 7. Simulated aberration curves for different reference wavelengths.(a) 799 nm; (b) 275.8 nm; (c) 226.8 nm; (d) 200 nm; (e) 185.85 nm; (f) 165 nm

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    (a) Simulated spectra at image plane of two-dimensional detector.(a) 210-800 nm; (b) 165-230 nm

    Fig. 8. (a) Simulated spectra at image plane of two-dimensional detector.(a) 210-800 nm; (b) 165-230 nm

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    Spectral calibration. (a) 210-800 nm; (b) 165-230 nm; (c) 165-800 nm

    Fig. 9. Spectral calibration. (a) 210-800 nm; (b) 165-230 nm; (c) 165-800 nm

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    • Table 1. Design parameters of spectrometer

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      Table 1. Design parameters of spectrometer

      ParameterValue
      Spectral range165-230 nm,210-800 nm
      CCD parameterPixel size:13 μm×13 μmEffective pixel number: 1024×2014
      Prism apex angle21.5°
      Echelle grating blazed angle46°
      Echelle grating groove density54.49 line·mm-1
      Echelle grating off-axis angle7°
      Distance between double-slit8.1 mm
      Focus length200 mm
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    Haixia Cao, Yingfei Zhao, Miao He, Weidong Wang, Chao Wang. Design of Small-Size High Resolution Echelle Grating Spectrometer with Divided Spectral Coverage[J]. Acta Optica Sinica, 2018, 38(11): 1105002

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    Paper Information

    Category: Diffraction and Gratings

    Received: May. 7, 2018

    Accepted: Jul. 12, 2018

    Published Online: May. 9, 2019

    The Author Email:

    DOI:10.3788/AOS201838.1105002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology