Acta Photonica Sinica, Volume. 53, Issue 11, 1131001(2024)

Research Progress of Thin Film Devices in the Far Ultraviolet (Invited)

Jinlong ZHANG1,2,3,4、*, Shuangying LI1,2,3,4, Qize WU1,2,3,4, Hongfei JIAO1,2,3,4, Xinbin CHEN1,2,3,4, and Zhanshan WANG1,2,3,4
Author Affiliations
  • 1Institute of Precision Optical Engineering,School of Physics Science and Engineering,Tongji University,Shanghai 200092,China
  • 2MOE Key Laboratory of Advanced Micro-Structured Materials,Tongji University,Shanghai 200092,China
  • 3Shanghai Frontiers Science Center of Digital Optics,Shanghai 200092,China
  • 4Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications,Shanghai 200092,China
  • show less
    References(71)

    [1] BEASLEY M, BOONE C, CUNNINGHAM N et al. Imaging spectrograph for interstellar shocks: a narrowband imaging payload for the far ultraviolet[J]. Applied Optics, 43, 4633-4642(2004).

    [2] BREKKE P. An ultraviolet spectral atlas of the sun between 1190-1730 Å[J]. The Astrophysical Journal Supplement Series, 87, 443-450(1993).

    [3] HANLE W. Über magnetische beeinflussung der polarisation der resonanzfluoreszenz[J]. Zeitschrift Für Physik D Atoms Molecules & Clusters, 30, 93-105(1924).

    [4] GREEN J C, FRANCE K. SubLymE: the sub-Lyman alpha explorer[C]. SPIE, 9144, 21-30(2014).

    [5] CUNNINGHAM N J, WILKINSON E. Holographic telescope design for wide-field imaging of O VI 1032, 1038 Å[C], 5166, 296-306(2004).

    [6] FONTENLA J M, AVRETT E H, LOESER R. Energy balance in the solar transition region. III-Helium emission in hydrostatic, constant-abundance models with diffusion[J]. The Astrophysical Journal, 406, 319-345(1993).

    [7] CARLSSON M, LEENAARTS J. Approximations for radiative cooling and heating in the solar chromosphere[J]. Astronomy & Astrophysics, 539, A39(2012).

    [8] COSTA F RDA, FLETCHER L, LABROSSE N et al. Observations of a solar flare and filament eruption in Lyman and X-rays[J]. Astronomy & Astrophysics, 507, 1005-1014(2009).

    [10] PAXTON L J, MENG C I, FOUNTAIN G H et al. SSUSI: Horizon-to-horizon and limb-viewing spectrographic imager for remote sensing of environmental parameters[C], 1764, 161-176(1993).

    [11] ATTWOOD D[M]. Soft x-rays and extreme ultraviolet radiation: principles and applications(2000).

    [12] MCCOY R P. Space weather comes of age: new sensors and models for ionospheric specification and forecast[C], 5548, 341-347(2004).

    [13] MEIER R R. Ultraviolet spectroscopy and remote sensing of the upper atmosphere[J]. Space Science Reviews, 58, 1-185(1991).

    [15] TANG Yi, NI Guoqiang, WU Yan et al. Applications and development of the vacuum ultraviolet imaging spectrometer in space science[J]. Optical Technique, 5, 582-589(2011).

    [16] MALHERBE A. Interference filters for the far ultraviolet[J]. Applied Optics, 13, 1275-1276(1974).

    [17] LÓPEZ-REYES P, HONRADO-BENÍTEZ C, GUTIÉRREZ-LUNA N et al. Far-UV reflectance and stress of narrowband AlF3/LaF3 multilayers[J]. Optical Materials Express, 12, 489-502(2022).

    [18] KAISER N, ANTON B, JANCHEN H et al. Laser conditioning of LaF3/MgF2 dielectric coatings for excimer lasers[C], 2428, 400-409(1995).

    [19] HUNTER W R, OSANTOWSKI J F, HASS G. Reflectance of aluminum overcoated with MgF2 and LiF in the wavelength region from 1600 Å to 300 Å at various angles of incidence[J]. Applied Optics, 10, 540-544(1971).

    [20] WILKINSON E, GREEN J C, OSTERMAN S N et al. Integration, alignment, and initial performance results of the Far Ultraviolet Spectroscopic Explorer (FUSE) spectrograph[C], 3356, 18-29(1998).

    [21] GAMBINO N, ROLLINGER B, HUDGINS D et al. Spectral emission properties of a laser-produced plasma light source in the sub-200 nm range for wafer inspection applications[J]. Journal of Micro/Nanolithography, 14, 034002(2015).

    [22] PETERS P J M, FEENSTRA L, BASTIAENS H M J. Long-pulse ArF and F2 excimer lasers[C], 4184, 338-347(2001).

    [23] GOHIL P, BURGESS D D. A comparison between laser-induced fluorescence at Balmer-alpha and at Lyman-alpha for the measurement of neutral hydrogen densities in magnetically contained fusion plasmas[J]. Plasma Physics, 25, 1149(1983).

    [24] FRANCE K, FLEMING B, WEST G et al. The LUVOIR ultraviolet multi-object spectrograph (LUMOS): instrument definition and design[C], 10397, 303-324(2017).

    [25] BIANCHI L, EFREMOVA B, HODGE P et al. A treasury study of star-forming regions in the local group. I. HST photometry of young populations in six dwarf galaxies[J]. The Astronomical Journal, 143, 74(2012).

    [26] HASS G. Filmed surfaces for reflecting optics[J]. JOSA, 45, 945-952(1955).

    [27] HASS G, HUNTER W R, TOUSEY R. Reflectance of evaporated aluminum in the vacuum ultraviolet[J]. Journal of the Optical Society of America, 46, 1009-1012(1956).

    [28] VIDAL-DASILVA M, FERNÁNDEZ-PEREA M, MÉNDEZ J A et al. Electron-beam deposited boron coatings for the extreme ultraviolet[J]. Applied Optics, 47, 2926-2930(2008).

    [29] LARRUQUERT J I, MARCOS R D, GARCÍA-CORTÉS S et al. Coating development for the far and extreme ultraviolet based on material characterization[C], 8168, 302-311(2011).

    [30] HUANG Zhiyu, MESSINA , DANIEL C et al. Multilayer ultraviolet reflective coating based on atomic layer deposited aluminum oxide and fluoride[J]. Journal of Vacuum Science & Technology A: Vacuum, 39, 042402(2021).

    [32] LÓPEZ-REYES P, GUTIÉRREZ-LUNA N, HONRADO-BENÍTEZ C et al. Far UV narrowband mirrors tuned at H Lyman α[J]. Optics Express, 31, 15392-15408(2023).

    [33] LEE C C, LIU M C, KANEKO M et al. Characterization of AlF3 thin films at 193 nm by thermal evaporation[J]. Applied Optics, 44, 7333-7338(2005).

    [34] FERNÁNDEZ-PEREA M, VIDAL-DASILVA M, LARRUQUERT J I et al. Optical constants of evaporation-deposited silicon monoxide films in the 7.1–800 eV photon energy range[J]. Journal of Applied Physics, 105, 113505(2009).

    [35] VIDAL-DASILVA M, FERNÁNDEZ-PEREA M, MÉNDEZ J A et al. Narrowband multilayer coatings for the extreme ultraviolet range of 50-92 nm[J]. Optics Express, 17, 22773-22784(2009).

    [36] GUO Chun, LIN Dawei, ZHANG Yundong et al. Determination of optical constants of LaF3 films from spectrophotometric measurements[J]. Acta Optica Sinica, 31, 0731001(2011).

    [37] XUE Chunrong, YI Kui, QI Hongji et al. Optical constants of film materials for deep ultraviolet/ultraviblet[J]. Chinese Journal of Lasers, 36, 2135-2139(2009).

    [38] RISTAU D, GUNSTER S, BOSCH S et al. Ultraviolet optical and microstructural properties of MgF2 and LaF3 coatings deposited by ion-beam sputtering and boat and electron-beam evaporation[J]. Applied Optics, 41, 3196-3204(2002).

    [39] ZUKIC M, TORR D G, SPANN J F et al. Vacuum ultraviolet thin films. 1: optical constants of BaF2, CaF2, LaF3, MgF2, Al2O3, HfO2, and SiO2 thin films[J]. Applied Optics, 29, 4284-4292(1990).

    [40] BRIDOU F, CUNIOT-PONSARD M, DESVIGNES J M et al. Experimental determination of optical constants of MgF2, and AlF3, thin films in the vacuum ultra-violet wavelength region (60-124 nm), and its application to optical designs[J]. Optics Communications, 283, 1351-1358(2010).

    [41] WANG Fengli, ZHANG Zhuangzhuang, WANG Zhanshan et al. Optical constant of MgF2 coatings for Al/MgF2 mirror in vacuum ultraviolet region[J]. Optics and Precision Engineering, 25, 2823-2828(2017).

    [42] MARCOS R D, LARRUQUERT J I. Self-consistent optical constants of MgF2, LaF3, and CeF3 films[J]. Optical Materials Express, 7, 989-1006(2017).

    [43] KESKI-KUHA R A M, LARRUQUERT J I, GUM J S et al. Optical coatings and materials for ultraviolet space applications[C], 164, 406(1999).

    [44] HUTCHESON E T, HASS G, COX J T. Effect of deposition rate and substrate temperature on the vacuum ultraviolet reflectance of MgF2-and LiF-overcoated aluminum mirrors[J]. Applied Optics, 11, 2245-2248(1972).

    [45] WOOD O R, CRAIGHEAD H G, SWEENEY J E et al. Vacuum ultraviolet loss in magnesium fluoride films[J]. Applied Optics, 23, 3644-3649(1984).

    [46] QUIJADA M A, HOYO J D, RICE S. Enhanced far-ultraviolet reflectance of MgF2 and LiF over-coated Al mirrors[C]. SPIE, 9144, 1357-1366(2014).

    [47] ADRIAENS M R, FEUERBACHER B. Improved LiF and MgF2 overcoated aluminum mirrors for vacuum ultraviolet astronomy[J]. Applied Optics, 10, 958-959(1971).

    [48] MARCOS R D, LARRUQUERT J I, MÉNDEZ J A et al. Optimization of MgF2-deposition temperature for far UV Al mirrors[J]. Optics Express, 26, 9363-9372(2018).

    [49] WANG Fengli, LI Shuangying, ZHANG Zhuangzhuang et al. Effect of MgF2 deposition temperature on Al mirrors in vacuum ultraviolet[C], 11064, 155-160(2019).

    [50] WILBRANDT S, STENZEL O, NAKAMURA H et al. Protected and enhanced aluminum mirrors for the VUV[J]. Applied Optics, 53, A125-A130(2014).

    [51] OLIVEIRA C M, RETHERFORD K, CONARD S J et al. Aging studies of LiF-coated optics for use in the far ultraviolet[C], 3765, 52-60(1999).

    [52] ANGEL D W, HUNTER W R, TOUSEY R et al. Extreme ultraviolet reflectance of LiF-coated aluminum mirrors[J]. JOSA, 51, 913-914(1961).

    [53] HENNESSY J, NIKZAD S. Atomic layer deposition of lithium fluoride optical coatings for the ultraviolet[J]. Inorganics, 6, 46(2018).

    [54] FLEMING B, QUIJADA M, HENNESSY J et al. Advanced environmentally resistant lithium fluoride mirror coatings for the next generation of broadband space observatories[J]. Applied Optics, 56, 9941-9950(2017).

    [55] BALASUBRAMANIAN K, HENNESSY J, RAOUF N et al. Coatings for UVOIR telescope mirrors[C], 9602, 195-203(2015).

    [56] LI Shuangying, WANG Fengli, WANG Zhanshan et al. Effect of humidity on the performance of Al/LiF/eMgF2 mirrors in the far ultraviolet spectrum[J]. Optical Engineering, 61, 031205(2021).

    [57] LI Hui. The Lyman-α Solar Telescope (LST) for the ASO-S mission[J]. Proceedings of the International Astronomical Union, 11, 436-438(2015).

    [58] LI Feng, LI Hui, CHEN Bo et al. The Lyman-alpha Solar Telescope (LST) for the ASO-S mission-III. data and potential diagnostics[J]. Research in Astronomy and Astrophysics, 19, 162(2019).

    [59] RAUCH M. The lyman alpha forest in the spectra of QSOs[J]. Annual Review of Astronomy & Astrophysics, 36, 267-316(1998).

    [60] LARRUQUERT J I, MÉNDEZ J A, AZNÁREZ J A et al. GOLD's coating and testing facilities for ISSIS-WSO[J]. Astrophysics and Space Science, 335, 305-309(2011).

    [61] ZUKIC M, TORR D G. Multiple reflectors as narrow-band and broadband vacuum ultraviolet filters[J]. Applied Optics, 31, 1588-1596(1992).

    [62] PARK J, ZUKIC M, MCCOLGAN M W et al. Design and fabrication of multilayer reflective filters for a Ritchey-Chretien Lyman-alpha telescope[J]. Optical Engineering, 35, 1479-1482(1996).

    [63] GUO Chun, KONG Mingdong, LIN Dawei et al. Fluoride coatings for vacuum ultraviolet reflection filters[J]. Applied Optics, 54, 10498-10503(2015).

    [64] NARUKAGE N, KUBO M, ISHIKAWA R et al. High-reflectivity coatings for a vacuum ultraviolet spectropolarimeter[J]. Solar Physics, 292, 1-17(2017).

    [65] WANG Xiaodong, CHEN Bo, LIU Yang et al. Design and fabrication of narrowband 121.6 nm minus filters[C], 10691, 166-176(2018).

    [66] LÓPEZ-REYES P, PEREA-ABARCA B, HONRADO-BENÍTEZ C et al. Optimization of the deposition parameters of MgF2/LaF3 narrowband reflective FUV multilayers[J]. Optical Materials Express, 11, 1678-1691(2021).

    [67] LÓPEZ-REYES P, ENRÍQUEZ E, CRESPILLO M L et al. Unveiling the effects of the surface and in-depth nanostructure on the far-UV optical reflectance of thin fluoride multilayer coatings[J]. Applied Surface Science, 640, 158455(2023).

    [68] WANG Jinyan, ZHANG Jinlong, JIAO Hongfei et al. Study on high reflective film in 121.6 nm far ultraviolet[J]. Acta Optica Sinica, 40, 226-232(2020).

    [69] VOURLIDAS A, SANCHEZ ANDRADE-NUÑO B, LANDI E et al. The structure and dynamics of the upper chromosphere and lower transition region as revealed by the sub arcsecond VAULT observations[J]. Solar Physics, 261, 53-75(2010).

    [70] LEMAIRE P, VIAL J C, CURDT W et al. The solar hydrogen Lyman α to Lyman β line ratio[J]. Astronomy & Astrophysics, 542, L25(2012).

    [71] WILKINSON E, INDEBETOUW R, BEASLEY M. Technique for narrow-band imaging in the far ultraviolet based on aberration-corrected holographic gratings[J]. Applied Optics, 40, 3244-3255(2001).

    [72] MARCOS D R, LARRUQUERT J I, MÉNDEZ J A et al. Lyman-β narrowband coatings with strong Lyman-α rejection[J]. Optics Express, 26, 25166-25177(2018).

    [73] EDELSTEIN J. Reflection/suppression coatings for 900-1200 Å radiation[C], 1160, 19-25(1989).

    [74] YU Yue, YE Zeyi, JIANG Li et al. Laboratory-based reflectometer using line spectra of an RF-induced gas-discharge lamp in 30-to 200-nm wavelength range[J]. Journal of Astronomical Telescopes, Instruments, and Systems, 8, 017002(2022).

    Tools

    Get Citation

    Copy Citation Text

    Jinlong ZHANG, Shuangying LI, Qize WU, Hongfei JIAO, Xinbin CHEN, Zhanshan WANG. Research Progress of Thin Film Devices in the Far Ultraviolet (Invited)[J]. Acta Photonica Sinica, 2024, 53(11): 1131001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Apr. 28, 2024

    Accepted: Jul. 2, 2024

    Published Online: Jan. 8, 2025

    The Author Email: Jinlong ZHANG (jinlong@tongji.edu.cn)

    DOI:10.3788/gzxb20245311.1131001

    Topics