Acta Optica Sinica, Volume. 44, Issue 20, 2012001(2024)

Aspheric Subaperture Stitching Interferometry with Single-Wedge Variable Compensation

Yi Zong1, Shengyao Sun1, Xiyuan Shi1, Caiyun Yu1, Yixuan Liu1, Mingliang Duan2, and Jianxin Li1、*
Author Affiliations
  • 1School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing 210094, Jiangsu , China
  • 2School of Automation, Nanjing University of Information Science & Technology, Nanjing 210044, Jiangsu , China
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    Figures & Tables(18)
    Non-spherical subaperture splicing interferometry with variable compensation of single optical wedge
    Schematic diagram of optical wedge aberration
    Simulation results of astigmatism and coma in wavefront of wedge with respect to wedge angle and tilt angle. (a1)(a2) Optical simulation results; (b1)(b2) theoretical calculation results; (c1)(c2) differences of optical simulation results and theoretical calculation results
    Aberration of wedge outgoing wavefront varying with its wedge angle. (a) Astigmatism; (b) coma
    Aberration of wedge outgoing wavefront varying with its tilt angle. (a) Astigmatism; (b) coma
    Aberration of wedge outgoing wavefront varying with thickness of wedge and distance between wedge and focal point. (a) Thickness of wedge; (b) distance between wedge and focal point
    Curves of aberration of wedge outgoing wavefront varying with different F numbers. (a) Astigmatism; (b) coma; (c) overall adjustment capacity
    Aspherical subaperture stitching interferometer with single-wedge compensation
    Single-wedge compensator and its adjustment device
    Schematic diagram of misalignment of rotation axis of single-wedge compensator
    Full-aperture detection result of tested parabolic mirror
    Whole pose adjustment results of optical wedge compensator. (a) Quasi-zero state interferogram of front surface of optical wedge; (b) quasi-zero state interferogram of rear surface of optical wedge
    Fringes of spherical mirror during zeroing process of single-wedge. Fringes of spherical mirror 1 (a) before and (b) after moving 1 mm; fringes of spherical mirror 2 (c) before and (d) after moving 1 mm
    Fringes of alignment processes of thickness and rotational axis of single-wedge. Fringes of (a) front and (b) rear surfaces with aligned wedge thickness; (c) initial and (d) final image plane fringes for zeroing state of single-wedge
    Measured partially aspherical fringes. (a) Schematic diagram of subaperture planning; (b)‒(f) subaperture fringes with rotational angles of 0°, 22.5°, 45°, 67.5°, and 90°, corresponding to apertures of numbers 1‒5 in subaperture planning diagram; (g) simulated fringes with rational angle of 0°
    Measurment results of aspherical surface type. (a) Splicing recovery phase of proposed method; (b) dot scanning result of LuphoScan 260; (c) residual
    • Table 1. Zernike polynomial coefficients for outgoing wavefront of wedge

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      Table 1. Zernike polynomial coefficients for outgoing wavefront of wedge

      TermValueTermValueTermValuesTermValue
      Z1-2.593Z6-10.648Z110.001Z160
      Z20Z70.348Z12-0.003Z170
      Z30.986Z80Z130Z180
      Z4-1.496Z9-0.121Z14-0.003Z190
      Z50Z100Z150Z200
    • Table 2. Positioning errors of sub-aperture calculated by splicing method

      View table

      Table 2. Positioning errors of sub-aperture calculated by splicing method

      nΔz/λΔβ /radΔγ /radΔx /pixelΔy /pixelΔα /rad
      1000000
      2-0.00930.00490.00190.03-1.750.00423
      30.09610.00200.87300.73-2.57-0.00261
      4-0.0666-0.00230.78791.93-3.890.00418
      5-0.22500.00240.02993.94-3.610.00369
      6-0.06130.0078-0.6364.53-3.14-0.00554
      7-0.1080-0.0006-0.01065.20-3.020.00909
      80.00320.0016-0.01366.25-2.33-0.00037
      90.00710.0026-0.85706.830.10-0.00029
      10-0.11700.0122-0.16006.381.990.00658
      11-0.14800.01070.79705.563.070.00094
      120.02440.00340.60404.544.25-0.00030
      13-0.23100.0022-0.04792.744.600.00850
      140.02060.0015-0.42201.624.550.00417
      15-0.2000-0.0051-0.92301.124.09-0.00333
      16-0.2660-0.0047-0.10700.163.00-0.00350
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    Yi Zong, Shengyao Sun, Xiyuan Shi, Caiyun Yu, Yixuan Liu, Mingliang Duan, Jianxin Li. Aspheric Subaperture Stitching Interferometry with Single-Wedge Variable Compensation[J]. Acta Optica Sinica, 2024, 44(20): 2012001

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Apr. 29, 2024

    Accepted: May. 23, 2024

    Published Online: Oct. 12, 2024

    The Author Email: Li Jianxin (ljx@163.com)

    DOI:10.3788/AOS240934

    CSTR:32393.14.AOS240934

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