Acta Optica Sinica, Volume. 44, Issue 20, 2012001(2024)
Aspheric Subaperture Stitching Interferometry with Single-Wedge Variable Compensation
Fig. 1. Non-spherical subaperture splicing interferometry with variable compensation of single optical wedge
Fig. 3. Simulation results of astigmatism and coma in wavefront of wedge with respect to wedge angle and tilt angle. (a1)(a2) Optical simulation results; (b1)(b2) theoretical calculation results; (c1)(c2) differences of optical simulation results and theoretical calculation results
Fig. 4. Aberration of wedge outgoing wavefront varying with its wedge angle. (a) Astigmatism; (b) coma
Fig. 5. Aberration of wedge outgoing wavefront varying with its tilt angle. (a) Astigmatism; (b) coma
Fig. 6. Aberration of wedge outgoing wavefront varying with thickness of wedge and distance between wedge and focal point. (a) Thickness of wedge; (b) distance between wedge and focal point
Fig. 7. Curves of aberration of wedge outgoing wavefront varying with different F numbers. (a) Astigmatism; (b) coma; (c) overall adjustment capacity
Fig. 8. Aspherical subaperture stitching interferometer with single-wedge compensation
Fig. 10. Schematic diagram of misalignment of rotation axis of single-wedge compensator
Fig. 12. Whole pose adjustment results of optical wedge compensator. (a) Quasi-zero state interferogram of front surface of optical wedge; (b) quasi-zero state interferogram of rear surface of optical wedge
Fig. 13. Fringes of spherical mirror during zeroing process of single-wedge. Fringes of spherical mirror 1 (a) before and (b) after moving 1 mm; fringes of spherical mirror 2 (c) before and (d) after moving 1 mm
Fig. 14. Fringes of alignment processes of thickness and rotational axis of single-wedge. Fringes of (a) front and (b) rear surfaces with aligned wedge thickness; (c) initial and (d) final image plane fringes for zeroing state of single-wedge
Fig. 15. Measured partially aspherical fringes. (a) Schematic diagram of subaperture planning; (b)‒(f) subaperture fringes with rotational angles of 0°, 22.5°, 45°, 67.5°, and 90°, corresponding to apertures of numbers 1‒5 in subaperture planning diagram; (g) simulated fringes with rational angle of 0°
Fig. 16. Measurment results of aspherical surface type. (a) Splicing recovery phase of proposed method; (b) dot scanning result of LuphoScan 260; (c) residual
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Yi Zong, Shengyao Sun, Xiyuan Shi, Caiyun Yu, Yixuan Liu, Mingliang Duan, Jianxin Li. Aspheric Subaperture Stitching Interferometry with Single-Wedge Variable Compensation[J]. Acta Optica Sinica, 2024, 44(20): 2012001
Category: Instrumentation, Measurement and Metrology
Received: Apr. 29, 2024
Accepted: May. 23, 2024
Published Online: Oct. 12, 2024
The Author Email: Li Jianxin (ljx@163.com)
CSTR:32393.14.AOS240934