Acta Optica Sinica, Volume. 40, Issue 10, 1031001(2020)

Spatial Resolution of Infrared Scene Projector Chip with Periodical Microstructure

Qian Zhao1,2, Zhuo Li1,2, Xin Wang1,2、*, Defang Li1,2, and Liqiang Xu1,2
Author Affiliations
  • 1School of Optics and Photonics, Beijing Institute of Technology, Beijng 100081, China
  • 2Beijing Key Lab for Precision Optoelectronic Measurement Instrument and Technology, Beijing 100081, China
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    A method for improving the spatial resolution of an infrared scene projector chip is proposed by making in-plane microstructures. By establishing a simplified two-dimensional heat conduction model, the spatial resolution of the chip with periodical microstructure is calculated. On this basis, the influences of contact area ratio and filling factor of microstructure on the spatial resolution of this infrared scene projector chip are studied and the optimization design of periodical microstructure is realized. The theoretical calculation shows that by fabricating the microstructure with a contact area ratio of 0.18 and a filling factor of 0.52, the spatial resolution can be improved to 10.3 lp·mm -1 at an MTF of 0.3, twice that of the chip without microstructure. Two kinds of infrared scene projector chips with different contact area ratios and filling factors are fabricated. The diameter of the chip is 7.62 cm and the thickness is about 800 nm. Using the non-contact steady-state infrared imaging method, the spatial resolutions of these two chips are measured. When the MTF value is 0.3, the spatial resolutions of the chips with contact area ratios of 0.20 and 0.46 are 11.2 lp·mm -1 and 6.6 lp·mm -1, respectively. Our experimental results coincide well with those of the theoretical calculation, indicating that the proposed method is effective and practical for spatial resolution improvement.

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    Qian Zhao, Zhuo Li, Xin Wang, Defang Li, Liqiang Xu. Spatial Resolution of Infrared Scene Projector Chip with Periodical Microstructure[J]. Acta Optica Sinica, 2020, 40(10): 1031001

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    Paper Information

    Category: Thin Films

    Received: Dec. 16, 2019

    Accepted: Feb. 17, 2020

    Published Online: Apr. 28, 2020

    The Author Email: Wang Xin (wangxin@bit.edu.cn)

    DOI:10.3788/AOS202040.1031001

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