Fig. 1. DMD's actual photo and partial area enlarged view

Fig. 2. Schematic diagram of the three-dimensional structure of the micro-mirror unit

Fig. 3. Light path diagram of the test device

Fig. 4. Photo of the test device

Fig. 5. Simulation results of the spot size when F/#=8

Fig. 6. Simulation results of the spot size when F/#=17

Fig. 7. Experimental test results

Fig. 8. Grayscale distribution of detector pixels when only the 2×2 array micro-mirror unit is in the "on" state and all micro-mirror units are also in the "on" state

Fig. 9. Absolute intensity distribution of stray light in the 2×2 array micro-mirror unit test mode

Fig. 10. Relative intensity distribution of stray light in the 2×2 array micro-mirror unit test mode