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Opto-Electronic Engineering, Volume. 38, Issue 9, 46(2011)

Analysis of Effect of Lateral Fabrication Errors on Binary Optical Elements

YIN Ke-wei1,2、*, HUANG Zhi-qiang1, LIN Wu-mei1, and XING Ting-wen1
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  • 1[in Chinese]
  • 2[in Chinese]
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    [1] [1] Joseph W Goodman. Introduction to Fourier Optics [M]. Beijing: Publishing House of Electronics Industry，2006: 57-88.

    [6] [6] Hyun Choi，Wan-Chin Kim，Sang-Hyuck Lee，et al. Effects of fabrication errors in the diffractive optical element on the modulation transfer function of a hybrid lens [J]. Optical Society of America(S1520-8532)，2008，25(11): 2764-2766.

    [7] [7] Adam J Caley，Markus Braun，Andrew J Waddie，et al. Analysis of multimask fabrication errors for diffractive optical elements [J]. APPLIED OPTICS(S2155-3165)，2007，46(12): 2180-2188.

    [8] [8] Yasuyuki Unno. Point-spread function for binary diffractive lenses fabricated with misaligned masks [J]. APPLIED OPTICS (S2155-3165)，1998，37(16): 3401-3407.

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    YIN Ke-wei, HUANG Zhi-qiang, LIN Wu-mei, XING Ting-wen. Analysis of Effect of Lateral Fabrication Errors on Binary Optical Elements[J]. Opto-Electronic Engineering, 2011, 38(9): 46

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    Paper Information

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    Received: Jun. 1, 2011

    Accepted: --

    Published Online: Sep. 27, 2011

    The Author Email: Ke-wei YIN (ykw.258@163.com)

    DOI:10.3969/j.issn.1003-501x.2011.09.009

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology