OPTICS & OPTOELECTRONIC TECHNOLOGY, Volume. 19, Issue 4, 45(2021)
Grating-Based Double-Layer Cantilever Structure Design and Closed-Loop Feedback Control
[1] [1] Tveten A, Dandridge A, Davis C M, et al. Fibre optic accelerometer[J]. Electronics Letters, 1980, 16(22): 854-856.
[2] [2] Castro F, Carneiro S, Lisboa O, et al. Two mode optical fiber accelerometer[J]. Optics Letters, 1992, 17(20): 1474-1475.
[3] [3] Bhola B, Steier W. A novel optical microring resonator accelerometer[J]. Sensors Journal, IEEE, 2008, 7(12): 1759-1766.
[4] [4] Wu Y, Zeng X, Rao YJ, et al. MOEMS accelerometer based on microfiber knot resonator[J]. Photonics Technology Letters, 2009, 21(20): 1547-1549.
[5] [5] Plaza JA, Llobera A, Dominguez C, et al. BESOI-based integrated optical silicon accelerometer[J]. Journal of Microelectromechanical Systems, 2004, 13(2): 355-364.
[6] [6] Hall NA, Okandan M, Littrell R, et al. Micromachined accelerometers with optical interferometric read-out and integrated electrostatic actuation[J]. Journal of Microelectromechanical Systems, 2008, 17(1): 37-44.
[8] [8] Wang X, Feng L, Yao B, et al. Sensitivity improvement of micro-grating accelerometer based on differential detection method[J]. Applied Optics, 2013, 52(18): 4091-4096.
[9] [9] Yi D, He X, Liu F, et al. Self-suppression of common-mode noises of the different fiber optic interferometric accelerometers[J]. Optics Express, 2018, 26(12): 15384.
[11] [11] LU Qianbo, Jian Bai, Wang Kaiwei, et al. Design, optimization, and realization of a high-performance MOEMS accelerometer from a double-device-layer SOI wafer[J]. Journal of Microelectromechanical Systems, 2017, 26(4): 859-869.
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TAO Xin, OU Wei-lin, HE Wen-bo. Grating-Based Double-Layer Cantilever Structure Design and Closed-Loop Feedback Control[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2021, 19(4): 45
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Received: Mar. 22, 2021
Accepted: --
Published Online: Nov. 15, 2021
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