OPTICS & OPTOELECTRONIC TECHNOLOGY, Volume. 19, Issue 4, 45(2021)

Grating-Based Double-Layer Cantilever Structure Design and Closed-Loop Feedback Control

TAO Xin, OU Wei-lin, and HE Wen-bo
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    References(9)

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    [1] TAN Hong-yu, YAO Yuan. Silicon-Based Zipper Photonic Crystal Cavity Optomechanical System for Accelerometers[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2023, 21(6): 106

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    TAO Xin, OU Wei-lin, HE Wen-bo. Grating-Based Double-Layer Cantilever Structure Design and Closed-Loop Feedback Control[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2021, 19(4): 45

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    Paper Information

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    Received: Mar. 22, 2021

    Accepted: --

    Published Online: Nov. 15, 2021

    The Author Email:

    DOI:

    CSTR:32186.14.

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