OPTICS & OPTOELECTRONIC TECHNOLOGY, Volume. 19, Issue 4, 45(2021)

Grating-Based Double-Layer Cantilever Structure Design and Closed-Loop Feedback Control

TAO Xin, OU Wei-lin, and HE Wen-bo
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    Micro-grating accelerometers have the advantages of anti-electromagnetic interference, high precision, low power consumption, small volume and so on. They have wide application prospects in the fields of geophysics, gravity assisted navigation, oil and gas exploration and seismic detection. In order to suppress cross-axis interference, the design of a highly symmetric micro-electro-mechanical system sandwich accelerometer using a double-device-layer silicon-on-insulator (D-SOI) wafer is introduced in this paper. The COMSOL finite element simulation analysis shows that cross-axis sensitivity is only 0.01% when the double-device-layer thickness difference is 0.5 μm. The modal separation radio is increased by 5.3 times compared with traditional structures, which effectively improves the resistance to high-order mechanical modal disturbance. Based on this design, the features of static and magnetoelectric feedback methods are discussed. According to the structure and electrical specifications, magnetoelectric feedback method is adopted to improve the linearity range.

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    TAO Xin, OU Wei-lin, HE Wen-bo. Grating-Based Double-Layer Cantilever Structure Design and Closed-Loop Feedback Control[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2021, 19(4): 45

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    Paper Information

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    Received: Mar. 22, 2021

    Accepted: --

    Published Online: Nov. 15, 2021

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    DOI:

    CSTR:32186.14.

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