Chinese Journal of Lasers, Volume. 38, Issue 11, 1102008(2011)

Optimal Design of Prism Beam Expander in Line Narrowed Excimer Laser Cavity

Zhang Haibo1,2、*, Yuan Zhijun1, Zhou Jun1, Dong Jingxing1, Wei Yunrong1, and Lou Qihong1
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    References(19)

    [2] [2] F. J. Duarte. Multiple-return-pass beam divergence and the linewidth equation[J]. Appl. Opt., 2001, 40(18): 3038~3041

    [3] [3] F. J. Duarte. Solid-state multiple-prism grating dye-laser oscillators[J]. Appl. Opt., 1994, 33(18): 3857~3860

    [5] [5] T. R. Loree, K. B. Butterfield, D. L. Barker. Spectral tuning of ArF and KrF discharge lasers[J]. Appl. Phys. Lett., 1978, 32(3): 171~173

    [6] [6] R. S. Hargrove, J. A. Paisner. Tunable efficient VUV generation using ArF-pumped SRS in H2[C]. Topical meeting on Excimer lasers, 1979, ThA6

    [7] [7] Rick Trebino. Achromatic N-prism beam expanders: optimal configurations[J]. Appl. Opt., 1985, 24(8): 1130~1138

    [8] [8] Lou Qihong, Xu Jie, Fu Shufeng et al.. Gas Laser with Pulsed Discharge[M]. Beijing: Science Press, 1993. 255~288

    [9] [9] Li Hongxia, Lou Qihong, Dong Jingxing et al.. Research on spectral-narrowing of excimer lasers[J]. Optics & Optoelectronic Technology, 2004, 2(4): 44~47

    [11] [11] E. Loewen, D. Maystre, E. Popov et al.. Diffraction efficiency of echelles working in extremely high orders[J]. Appl. Opt., 1996, 35(10): 1700~1704

    [12] [12] J. R. M. Barr. Achromatic prism beam expanders[J]. Opt. Commun., 1984, 51(1): 41~46

    [13] [13] R. Gupta, J. H. Burnett, U. Griesmann et al.. Absolute refractive indices and thermal coefficients of fused silica and CaF2 near 193 nm[J]. Appl. Opt., 1998, 37(25): 5964~5968

    [14] [14] B. Rácz, Zs. Bor, S. Szatmári et al.. Comparative study of beam expanders used in nitrogen laser pumped dye lasers[J]. Opt. Commun., 1981, 36(5): 399~402

    [15] [15] Ch. Mühlig, W. Triebel, G. Tpfer et al.. Calcium fluoride for ArF laser lithography-characterization by in situ transmission and LIF measurements[C]. SPIE, 2003, 4932: 458~466

    [16] [16] J. H. Burnett, Z. H. Levine, E. L. Shirley. Intrinsic birefringence in calcium fluoride and barium fluoride[J]. Phys. Rev. B, 2001, 64(24): 241102

    [17] [17] J. H. Burnett, Z. H. Levine, E. L. Shirley et al.. Symmetry of spatial-dispersion-induced birefringence and its implications for CaF2 ultraviolet optics[J]. J. Microlith. Microfab. Microsyst., 2002, 1(3): 213~224

    [18] [18] Zhou Jun, Zhang Haibo, Zhao Hongming et al.. Line narrowing apparatus with beam shaping and rotational wavelength tuning[P]. China Patent, 101581866. 2010-12-29

    [19] [19] M. Born, E. Wolf, Principles of Optics[M]. 7th ed. Cambridge: Cambridge University Press, 1998. 446~460

    CLP Journals

    [1] Zhijun Yuan, Haibo Zhang, Ren Ye, Jun Zhou, Yunrong Wei, Qihong Lou, "Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp," Chin. Opt. Lett. 15, 071402 (2017)

    [2] Shan Yaoying, Zhao Jiangshan, Li Hui, Wang Qian, Sha Pengfei, Zhou Yi, Zhou Jun, Yuan Zhijun, Zhang Haibo, Lou Qihong. Application Study on Fused Silica Prisms in Excimer Laser Spectrum Control[J]. Chinese Journal of Lasers, 2013, 40(4): 402008

    [3] Wang Qian, Zhao Jiangshan, Zhou Yi. Analysis on Precision Assembly Characteristics of Prism Expander Applied to Spectrum Control[J]. Chinese Journal of Lasers, 2018, 45(4): 401012

    [4] Zhai Ye, Fan Yuanyuan, Wang Qian, Zhou Yi. Solid-State Lasers with High Power Stability and Continuously Tunable Coherence Length[J]. Chinese Journal of Lasers, 2014, 41(9): 902012

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    Zhang Haibo, Yuan Zhijun, Zhou Jun, Dong Jingxing, Wei Yunrong, Lou Qihong. Optimal Design of Prism Beam Expander in Line Narrowed Excimer Laser Cavity[J]. Chinese Journal of Lasers, 2011, 38(11): 1102008

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    Paper Information

    Category: Laser physics

    Received: Aug. 11, 2011

    Accepted: --

    Published Online: Oct. 24, 2011

    The Author Email: Haibo Zhang (haibohit@gmail.com)

    DOI:10.3788/cjl201138.1102008

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