Chinese Journal of Lasers, Volume. 26, Issue 3, 253(1999)

Fabrication of Low-loss Silica on Silicon Waveguides with Sol-Gel Techniques

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
Author Affiliations
  • [in Chinese]
  • show less
    References(10)

    [1] [1] D. E. Zelmon, H. E. Jackson, J. T. Boyd et al.. A low-scattering graded-index SiO2 planar optical waveguide thermally grown on silicon. Appl. Phys. Lett., 1983, 42(7): 565~566

    [2] [2] N. Imoto, N. Shimizu, H. Mori et al.. Sputtered silica waveguides with an embedded three-dimensional structure. J. Lightwave Technol., 1983, LT-1: 289~293

    [3] [3] M. Kawachi, M. Yasu, T. Edahiro. Fabrication of SiO2-TiO2 glass planar optical waveguides by flame hydrolisis deposition. Electron. Lett., 1983, 19(15): 583~584

    [4] [4] C. H. Henry, R. F. Kazarinow, H. J. Lee et al.. Lowloss Si3N4-SiO2 optical waveguides on Si. Appl. Opt., 1987, 26(13): 2621~2624

    [5] [5] G. Grand, J. P. Jadot, H. Denis et al.. Low-loss PECVD silica channel waveguides for optical communications. Electron. Lett., 1990, 26(25): 2135~2137

    [6] [6] L. L. Hench, W. Vasconcelos. Gel-silica Science. Annu. Rev. Mater. Sci., 1990, 20: 269~298

    [7] [7] K. Kamiya, S. Sakka, Y. Tatemichi. Preparation of glass fibres of the ZrO2-SiO2 and Na2O-ZrO2-SiO2 systems from metal alkoxides and their resistance to alkaline solution. J. Mater. Sci., 1980, 15(7): 1765~1771

    [8] [8] P. Hinz, H. Dislich. Anti-reflecting light-scattering coatings via the sol-gel-procedure. J. Non-Cryst. Solids, 1986, 82(1~3): 411~416

    [9] [9] Lin Yang, S. S. Saavedra, N. R. Armstrong et al.. Fabrication and characterization of low-loss, sol-gel planar waveguides. Anal. Chem., 1994, 66(8): 1254~1263

    [10] [10] R. Ulrich, R. Torge. Measurement of thin film parameters with a prism coupler. Appl. Opt., 1973, 12(12): 2901-2908

    CLP Journals

    [1] Jun Yang, Xinyu Zhang, Pei Wang, Hai Ming, Yunxia Wu, Jianping Xie, Junying Zhang, "Preparation and characterization of SiO2/TiO2/methylcellulose hybrid thick films for optical waveguides," Chin. Opt. Lett. 3, 07399 (2005)

    Tools

    Get Citation

    Copy Citation Text

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication of Low-loss Silica on Silicon Waveguides with Sol-Gel Techniques[J]. Chinese Journal of Lasers, 1999, 26(3): 253

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: materials and thin films

    Received: Nov. 3, 1997

    Accepted: --

    Published Online: Aug. 9, 2006

    The Author Email:

    DOI:

    Topics