Chinese Journal of Lasers, Volume. 26, Issue 3, 253(1999)
Fabrication of Low-loss Silica on Silicon Waveguides with Sol-Gel Techniques
Low loss SiO2 TiO2 waveguides were fabricated with sol gel techniques. Propagation loss of 0.57 dB/cm was obtained at 633 nm. A Y branch channel beam splitter was also fabricated on a Si substrate. The branch ratio is approximately 1∶1.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication of Low-loss Silica on Silicon Waveguides with Sol-Gel Techniques[J]. Chinese Journal of Lasers, 1999, 26(3): 253
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