Chinese Journal of Lasers, Volume. 52, Issue 12, 1202401(2025)
3D Micro‑Nano Structure Fabrication of Metal Oxides via Femtosecond Laser‑Integrated Coordination‑Enabled Scaffolds
Fig. 1. Fabrication process and principle of three-dimensional micro-nano structure of metal oxide. (a) Fabrication process; (b) compositions of photoresist material; (c) transmittance of photoresist under different wavelengths; (d) coordination reaction between metal ion and polymer scaffold; (e) demonstration of three-dimensional micro-nano structures of metal oxides
Fig. 2. Factors influencing loading rates of photoresist metal ions. (a) Ion loading rates of photoresist at different R; (b) loading rates of different metal ions
Fig. 3. Characterization of coordination reaction. (a) Raman spectra of photoresist before and after coordination; (b) XPS spectrum of O 1s orbital of microscopic scaffold before coordination; (c) XPS spectrum of O 1s orbital of microscopic scaffold after coordination
Fig. 5. Three-dimensional micro-nano structures of metal oxides fabricated under different coordination reaction conditions
Fig. 6. EDS element distributions and energy spectra of three-dimensional micro-nano structures of metal oxides
Fig. 7. XRD patterns of three-dimensional micro-nano structures of metal oxides. (a) NiO sample; (b) CoO sample; (c) Ni0.5Co0.5O sample
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Changjian Han, Kunjing Huang, Jiawen Li. 3D Micro‑Nano Structure Fabrication of Metal Oxides via Femtosecond Laser‑Integrated Coordination‑Enabled Scaffolds[J]. Chinese Journal of Lasers, 2025, 52(12): 1202401
Category: Laser Micro-Nano Manufacturing
Received: Mar. 7, 2025
Accepted: Apr. 11, 2025
Published Online: May. 24, 2025
The Author Email: Jiawen Li (jwl@ustc.edu.cn)
CSTR:32183.14.CJL250589