Low-cost method of fabricating large-aperture, high efficiency, Fresnel diffractive membrane optic using a modified moiré technique

Fig. 3. Conventional moiré fringe generated by a computer (P1=2.1 μm, P2=2 μm) with an x direction misalignment of (a) 0, (b) 0.25, (c) 0.5, and (d) 1 μm.

Download full size

View in Article

Fig. 4. The designed alignment mark on (a) the mask and (b) the wafer.

Download full size

View in Article

Fig. 5. The designed moiré fringe generated by a computer (P1=2.1 μm, P2=2 μm) with an x direction misalignment of (a) 0, (b) 0.2, (c) 0.5, and (d) 1 μm.

Download full size

View in Article

Fig. 6. Fabrication process of multi-level membrane FZLs.

Download full size

View in Article

Fig. 7. A replicated four-level membrane FZL.

Download full size

View in Article

Fig. 8. AFM profiles of four-level FZLs on fused silica before and after HF etching.

Download full size

View in Article

$Diffraction efficiency of a four-level membrane FZL.$

Fig. 9. Diffraction efficiency of a four-level membrane FZL.

Download full size

View in Article

Table 1. Comparison of AE between 5 FZLs Fabricated on Fused Silica by Using Conventional Alignment Marks and Modified Alignment Marks, (p1=4.2 μm, p2=4 μm)
View table
View in Article
Table 1. Comparison of AE between 5 FZLs Fabricated on Fused Silica by Using Conventional Alignment Marks and Modified Alignment Marks, (p1=4.2 μm, p2=4 μm)
AE (μm) Sample 1 Sample 2 Sample 3 Sample 4 Sample 5
Conventional Mark 0.7 0.65 0.65 0.6 0.6
Modified Mark 0.5 0.4 0.4 0.35 0.25

Table 2. Comparison of Diffraction Efficiency between 5 FZLs Fabricated on Fused Silica by Using Conventional Alignment Marks and Modified Alignment Marks, (p1=4.2 μm, p2=4 μm)
View table
View in Article
Table 2. Comparison of Diffraction Efficiency between 5 FZLs Fabricated on Fused Silica by Using Conventional Alignment Marks and Modified Alignment Marks, (p1=4.2 μm, p2=4 μm)
Diffraction Efficiency Sample 1 (%) Sample 2 (%) Sample 3 (%) Sample 4 (%) Sample 5 (%)
Conventional Mark 42.5 45 45 47 48
Modified Mark 54 55 58 61.5 66.6

Tools

Get Citation

Copy Citation Text

Jian Zhang, Mengjuan Li, Ganghua Yin, Jianchao Jiao, Zhengkun Liu, Xiangdong Xu, Shaojun Fu, "Low-cost method of fabricating large-aperture, high efficiency, Fresnel diffractive membrane optic using a modified moiré technique," Chin. Opt. Lett. 14, 100501 (2016)

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Diffraction and Gratings

Received: May. 6, 2016

Accepted: Aug. 12, 2016

Published Online: Aug. 2, 2018

The Author Email: Zhengkun Liu (zhkliu@ustc.edu.cn)

DOI:10.3788/COL201614.100501

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Comparison of AE between 5 FZLs Fabricated on Fused Silica by Using Conventional Alignment Marks and Modified Alignment Marks, (p1=4.2 μm, p2=4 μm)

Table 1. Comparison of AE between 5 FZLs Fabricated on Fused Silica by Using Conventional Alignment Marks and Modified Alignment Marks, (p1=4.2 μm, p2=4 μm)

Table 2. Comparison of Diffraction Efficiency between 5 FZLs Fabricated on Fused Silica by Using Conventional Alignment Marks and Modified Alignment Marks, (p1=4.2 μm, p2=4 μm)

Table 2. Comparison of Diffraction Efficiency between 5 FZLs Fabricated on Fused Silica by Using Conventional Alignment Marks and Modified Alignment Marks, (p1=4.2 μm, p2=4 μm)