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Optics and Precision Engineering, Volume. 15, Issue 12, 1915(2007)

Suppression of higher-order harmonics by different material filters in 13～43 nm

[in Chinese]1, [in Chinese]2, [in Chinese]1, [in Chinese]2, [in Chinese]1, and [in Chinese]1
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    [1] [1] SAMSON J A R.Filters and window materials[J].Techniques of Vacuum Ultraviolet Spectroscopy,1 967,180-208.

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    [2] Zhou Hongjun, Zhong Pengfei, Huo Tonglin, Jiang Xinting, Zheng Jinjin. Cleaning of Carbon Contamination on Si Wafer with Activated Oxygen by Synchrotron Radiation[J]. Acta Optica Sinica, 2010, 30(3): 907

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Suppression of higher-order harmonics by different material filters in 13～43 nm[J]. Optics and Precision Engineering, 2007, 15(12): 1915

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    Paper Information

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    Received: Aug. 20, 2007

    Accepted: --

    Published Online: Jul. 8, 2008

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology