Method for Calibration of Optical Axis Parallelism Based on Interference Fringes

Danhui Xu; Xiahui Tang; Guoming Fang; Dongjing Wu; Hairong Zhou

doi:10.3788/AOS202040.1712005

Acta Optica Sinica, Volume. 40, Issue 17, 1712005(2020)

Method for Calibration of Optical Axis Parallelism Based on Interference Fringes

Danhui Xu^1,2, Xiahui Tang^1、*, Guoming Fang², Dongjing Wu², and Hairong Zhou²

¹School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, Hubei 430074, China

²InfiRay Technology Co., Ltd., Chengdu, Sichuan 610213, China

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Figures & Tables(10)

Fig. 1. Schematic of calibration system

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Fig. 2. Schematic for determining parallelism ofoptical axis

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Fig. 3. Coordinate system of receiving optical system

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Fig. 4. MATLAB simulation interference patterns with different angle deviations. (a) 0 mrad; (b) 0.5 mrad; (c) 1.5 mrad

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Fig. 5. Light intensity distribution curves with different angle deviations. (a) 0 mrad; (b) 0.5 mrad; (c) 1.5 mrad

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Fig. 6. Flow chart of interference fringe image processing

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Fig. 7. Calibration of center coordinates. (a) No.4; (b) No.5; (c) No.7; (d) No.11; (e) No.12

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Table 1. Measurement data of coaxial between optical axis of receiving optical system and reference optical axis
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Table 1. Measurement data of coaxial between optical axis of receiving optical system and reference optical axis
N ${l_{or}}_{}$ /mm Δ ${θ_{R}}_{}$ /mrad ( ${O_{xy}}_{}$ /3.45) /μm Δ ${θ_{1}}_{}$ /mrad ${u_{1}}_{}$ /(″)
10 12.00 0 (1019.9,763.8) 0 0

Table 2. Measurement data of angle between optical axis of receiving optical system and reference optical axis

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Table 2. Measurement data of angle between optical axis of receiving optical system and reference optical axis

No.	${l_{or}}_{}$ /mm	Δl /mm	Δ ${θ_{R}}_{}$ /mrad	(O_xy/3.45) /μm	Δs /mm	Δ ${θ_{1}}_{}$ /mrad	${u_{1}}_{}$ /(″)
1	12.350	0.350	3.500000	(1018.6,703.6)	0.207738	3.462307	7.78
2	12.300	0.300	3.000000	(1019.4,711.4)	0.180783	3.013049	2.69
3	12.250	0.250	2.500000	(1019.4,720.0)	0.151120	2.518664	3.85
4	12.200	0.200	2.000000	(1020.0,728.8)	0.120751	2.012508	2.58
5	12.150	0.150	1.500000	(1019.7,736.8)	0.093153	1.552543	10.84
6	12.100	0.100	1.000000	(1019.4,746.7)	0.059020	0.983670	3.37
7	12.050	0.050	0.500000	(1020.5,755.0)	0.030431	0.507175	1.48
8	11.950	-0.050	0.500000	(1021.1,772.7)	0.056597	0.516381	3.38
9	11.900	-0.100	1.000000	(1020.3,780.2)	0.053148	0.943280	11.70
10	11.850	-0.150	1.500000	(1021.8,789.6)	0.089251	1.487517	2.57
11	11.800	-0.200	2.000000	(1022.3,798.0)	0.118280	1.971336	5.91
12	11.750	-0.250	2.500000	(1021.7,807.3)	0.150203	2.503391	0.70
13	11.700	-0.300	3.000000	(1022.9,815.6)	0.179009	2.983491	3.41
14	11.650	-0.350	3.500000	(1022.3,824.8)	0.210613	3.510214	2.11

Table 3. Measurement results of laser rangefinder
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Table 3. Measurement results of laser rangefinder
Laser rangefinder N D /m ${u_{D}}_{}$ /m
1 219 3271.88 0.48
2 222 3270.98 0.43

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Danhui Xu, Xiahui Tang, Guoming Fang, Dongjing Wu, Hairong Zhou. Method for Calibration of Optical Axis Parallelism Based on Interference Fringes[J]. Acta Optica Sinica, 2020, 40(17): 1712005

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Apr. 13, 2020

Accepted: Jun. 1, 2020

Published Online: Aug. 25, 2020

The Author Email: Tang Xiahui (txh1116@hust.edu.cn)

DOI:10.3788/AOS202040.1712005

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Measurement data of coaxial between optical axis of receiving optical system and reference optical axis

Table 1. Measurement data of coaxial between optical axis of receiving optical system and reference optical axis

Table 2. Measurement data of angle between optical axis of receiving optical system and reference optical axis

Table 2. Measurement data of angle between optical axis of receiving optical system and reference optical axis

Table 3. Measurement results of laser rangefinder

Table 3. Measurement results of laser rangefinder