Laser & Infrared, Volume. 54, Issue 6, 998(2024)

Progress on traveling wave electrode for silicon photon modulator

JIANG Han, GAO Wei-yu, LI Tian-wen, FAN Yong-jie, ZHANG Zhi-qun, GUI Jin-bin, CHEN Hua, and FANG Qing*
Author Affiliations
  • College of Science, Kunming University of Science and Technology, Kunming 650500, China
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    Silicon photonic modulator is an important electro-optical conversion element in silicon-based optical links, and the performance of traveling wave electrode, as a key part of silicon optical modulator carrying microwave signals, is a core factor in determining the modulation efficiency and transmission loss of the modulators. Currently, the design of traveling wave electrodes is mainly divided into coplanar waveguide structure and coplanar stripline structure. A coplanar stripline has a larger design matching range with respect to a coplanar waveguide, but the signal shielding capability is lower than that of the CPW's double-grounded system, which leads to the emergence of problems such as higher-order mode excitation and multimode interference. In order to optimize the modulator performance, many scholars have proposed finger-shaped extension electrodes, T-shaped extension electrodes, segmented electrodes, and other shapes to optimize the electrode structure to achieve impedance matching while enhancing electro-optical interactions and reducing the transmission loss. This paper summarizes the research results of domestic and foreign scholars on traveling wave electrodes, and analyzes and prospects the development trend of traveling wave electrodes.

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    JIANG Han, GAO Wei-yu, LI Tian-wen, FAN Yong-jie, ZHANG Zhi-qun, GUI Jin-bin, CHEN Hua, FANG Qing. Progress on traveling wave electrode for silicon photon modulator[J]. Laser & Infrared, 2024, 54(6): 998

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    Paper Information

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    Received: Oct. 19, 2023

    Accepted: May. 21, 2025

    Published Online: May. 21, 2025

    The Author Email: FANG Qing (qingfang@kust.edu.cn)

    DOI:10.3969/j.issn.1001-5078.2024.06.023

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