Infrared and Laser Engineering, Volume. 51, Issue 5, 20210303(2022)

Prediction analysis of subsurface damage of work-part ZnS in fixed abrasive lapping

Yufei Zhang, Zikun Wang, Weidong Hu, Fengli Niu, and Yongwei Zhu
Author Affiliations
  • College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
  • show less
    References(17)

    [1] Chen Bing, Guo Bing, Zhao Qingliang, et al. Ultra precision grinding of hot pressed zinc sulfide[J]. Optical Precision Engineering, 22, 2109-2116(2014).

    [2] Zhou Guanguan, Yu Haiou, Zheng Lihe, et al. high temperature properties of mid infrared optical materials[J]. Infrared and Laser Engineering, 41, 554-558(2012).

    [3] Liu Huasong, Jiang Chenghui, Li Shida, et al. Effect of vacuum heat treatment on optical and microstructure properties of ZnS thin films[J]. Optical Precision Engineering, 25, 2038-2045(2017).

    [4] Li gailing, Sun Kaiyuan, Feng Renyu, et al. Study on subsurface damage mechanism and common measurement methods[J]. Coal Mining, 99-100(2008).

    [5] Dai Zihua, Zhu Yongwei, Li Jun, et al. Study on measurement method of subsurface damage layer depth of K9 glass ground by consolidated abrasive[J]. Diamond and Abrasive Tool Engineering, 6-12(2014).

    [6] Li Qingpeng, Bai Qian, Zhang Bi. Detection of subsurface microcracks in monocrystalline silicon wafer after grinding by polarized laser scattering[J]. Diamond and Abrasive Tool Engineering, 40, 87-92(2020).

    [7] Liu Jian, Ma Zhanlong, Wang Junlin. Research status of subsurface damage detection technology for optical components[J]. Laser & Optoelectronics Progress, 48, 15-21(2011).

    [8] Wang Ningchang, Jiang Feng, Huang Hui, et al. Research status and development trend of subsurface damage detection of brittle materials[J]. Journal of Mechanical Engineering, 53, 081204(2017).

    [9] Tan Yuanqiang, Yang Dongmin, Li Cai, et al. Discrete element simulation of single crystal silicon processing crack[J]. China Mechanical Engineering, 19, 2545-2548,2581(2008).

    [10] Tan Yuanqiang, Yang Dongmin, Sheng Yong. Study of polycrystalline Al2O3 machining cracks using discrete element method[J]. International Journal of Machine Tool& Manufacture, 48, 975-982(2008).

    [11] Wang Jianbin, Ma Rui, Jiang Benchi, et al. Prediction of subsurface damage of single crystal sapphire by consolidation abrasive grinding[J]. Surface Technology, 49, 345-351(2020).

    [12] Zhu Yongwei, Li Xinlu, Wang Zhankui, et al. Subsurface damage prediction in consolidated abrasive grinding of optical hard and brittle materials[J]. Optical Precision, 25, 367-374(2017).

    [13] Dop A, Pac B. A bonded-particle model for rock[J]. International Journal of Rock Mechanics and Mining Sciences, 41, 1329-1364(2004).

    [14] Chen Bing, Jiao Haowen, Luo Liang, et al. Grinding removal mechanism of ZnS by multispectral CVD[J]. Aerospace Materials Technology, 49, 90-94(2019).

    [15] Zheng Xiulin, Liu Zhengtang. Comparison of different preparation methods and properties of ZnS[J]. Materials Guide, 35-38(1995).

    [16] Wang Zhankui, Zhu Yongwei, Li Xinlu, et al. Average cutting depth and subsurface damage behavior of magnesia alumina spinel by consolidated abrasive grinding[J]. Acta Silicate Sinica, 45, 402-409(2017).

    [17] Yin Jingfei, Bai Qian, Zhang Bi. Methods for detection of subsurface damage: A review[J]. Chinese Journal of Mechanical Engineering, 31, 1-14(2018).

    Tools

    Get Citation

    Copy Citation Text

    Yufei Zhang, Zikun Wang, Weidong Hu, Fengli Niu, Yongwei Zhu. Prediction analysis of subsurface damage of work-part ZnS in fixed abrasive lapping[J]. Infrared and Laser Engineering, 2022, 51(5): 20210303

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Optical devices

    Received: Dec. 25, 2021

    Accepted: --

    Published Online: Jun. 14, 2022

    The Author Email:

    DOI:10.3788/IRLA20210303

    Topics