Journal of Synthetic Crystals, Volume. 52, Issue 6, 1007(2023)

MOCVD Epitaxy of β-Ga2O3 Films on Off-Cut Angled Sapphire Substrates and Fabrication of Solar-Blind Ultraviolet Photodetector

WANG Zhengpeng*, ZHANG Chongde, SUN Xinyu, HU Tiancheng, CUI Mei, ZHANG Yijun, GONG Hehe, REN Fangfang, GU Shulin, ZHANG Rong, and YE Jiandong
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    WANG Zhengpeng, ZHANG Chongde, SUN Xinyu, HU Tiancheng, CUI Mei, ZHANG Yijun, GONG Hehe, REN Fangfang, GU Shulin, ZHANG Rong, YE Jiandong. MOCVD Epitaxy of β-Ga2O3 Films on Off-Cut Angled Sapphire Substrates and Fabrication of Solar-Blind Ultraviolet Photodetector[J]. Journal of Synthetic Crystals, 2023, 52(6): 1007

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    Paper Information

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    Received: Mar. 20, 2023

    Accepted: --

    Published Online: Aug. 13, 2023

    The Author Email: WANG Zhengpeng (zpwang@smail.nju.edu.cn)

    DOI:

    CSTR:32186.14.

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