Chinese Journal of Lasers, Volume. 13, Issue 10, 646(1986)

CW Ar+ laser recrystallization of inP films on SiO2

Lin Chenglu and Zhu Qing
Author Affiliations
  • [in Chinese]
  • show less
    References(6)

    [2] [2] J. D. Oberstar, В. G. Streetmaa: Thin Solid Films, 1983, 103, 17.

    [3] [3] Fang Pang et al.; Nuclear Instruments and Methods in Physics Eesearoh, 1985, B7/8, 348.

    [4] [4] Li Xiqiang et al., Energy Beam-Solid Interactions and Transioiit Thermal Processing (J. C. C. Fan aud N. M. Johnson, editors), North-Holland, 1984. p. 621.

    [5] [5] W. K. Chu et al., Backscattering Spectrometry, Academic Press, 1978.

    [6] [6] J. M. Poate, J. W. Mayer; Laser Annedliiig of Semiconductors, Academic Press, 1982.

    [7] [7] M. Neuberger; Handbook of .Electronic Material, 2, New York, 1971.

    Tools

    Get Citation

    Copy Citation Text

    Lin Chenglu, Zhu Qing. CW Ar+ laser recrystallization of inP films on SiO2[J]. Chinese Journal of Lasers, 1986, 13(10): 646

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: laser devices and laser physics

    Received: Jul. 1, 1985

    Accepted: --

    Published Online: Aug. 2, 2012

    The Author Email:

    DOI:

    CSTR:32186.14.

    Topics