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Opto-Electronic Engineering, Volume. 34, Issue 11, 50(2007)

Influence of fabrication error in ion beam etching on diffractive optical element

[in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]1,3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    [2] [2] LIN Y,Kessler T J,Lawrence G N.Distributed phase plates for super-Gaussian focal plane irradiance profiles[J].Opt.Lett,1995,20(7):764-771.

    [6] [6] Goodman J W.Introduction to Fourier Optics[M].New York:McGraw-Hill,1968.

    [9] [9] Chiong K G,Petrillo K,Horn F J,et al.Contrast and sensitivity enhancement of resist for high-resolution lithography[J].J Vac sci Technol,1998,B6(6):2238-2244.

    CLP Journals

    [1] Li Ke, Shi Peng, Zhang Xiaobo, Wang Shengbo, Huang Kun, Li Yongping. Design and Preparation of Diffraction Optical Element in Dual Lens System[J]. Chinese Journal of Lasers, 2010, 37(8): 1972

    [2] Liu Qiang, Wu Rong, Zhang Xiaobo, Li Yongping, Tian Yangchao. Technical Optimization of Multi-Level Diffractive Optical Elements[J]. Chinese Journal of Lasers, 2008, 35(8): 1165

    [3] HUANG Zhan-hua, ZHANG Ya-nan, FANG Shi, CAI Huai-yu. Method of Object Pose Measurement Based on Single PSD[J]. Acta Photonica Sinica, 2018, 47(9): 904001

    [4] Li Ke, Liu Qiang, Li Yongping. Influence of Reflection of Diffractive Optical Elements on High-Power Laser System[J]. Chinese Journal of Lasers, 2009, 36(6): 1371

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Influence of fabrication error in ion beam etching on diffractive optical element[J]. Opto-Electronic Engineering, 2007, 34(11): 50

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    Paper Information

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    Received: Jan. 20, 2007

    Accepted: --

    Published Online: Feb. 18, 2008

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology