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Opto-Electronic Engineering, Volume. 34, Issue 11, 50(2007)

Influence of fabrication error in ion beam etching on diffractive optical element

[in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]1,3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Influence of fabrication error in ion beam etching on diffractive optical element[J]. Opto-Electronic Engineering, 2007, 34(11): 50

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    Received: Jan. 20, 2007

    Accepted: --

    Published Online: Feb. 18, 2008

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology