Chinese Journal of Lasers, Volume. 31, Issue 12, 1473(2004)
Study on the Effects of Directional Ion Cleaning on the Characteristics of Substrate Surface
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on the Effects of Directional Ion Cleaning on the Characteristics of Substrate Surface[J]. Chinese Journal of Lasers, 2004, 31(12): 1473
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