[1] [1] S Fay, L Feitknecht, R Schlüchter, et al.. Rough ZnO layers by LP-CVD process and their effect in improving performances of amorphous and microcrystalline silicon solar cells[J]. Solar Energy Materials & Solar Cells, 2006, 90(18-19): 2960-2967.

[2] [2] M Berginski, H Hüpkes, W Reetz, et al.. Recent development on surface-textured ZnOAl films prepared by sputtering for thin-film solar cell application[J]. Thin Solid Films, 2008, 516(17): 5836-5841.

[3] [3] J Muller, B Rech, J Springer, et al.. TCO and light trapping in silicon thin film solar cells[J]. Solar Energy, 2004, 77(6): 917-930.

[4] [4] J Krc, F Smole, M Topic. Analysis of light scattering in amorphous SiH solar cells by a one-dimensional semi-coherent optical model[J]. Progress and Photovoltaics: Research and Application, 2003, 11(1): 15-26.

[5] [5] O Kluth, G Schpe, J Hüpkes, et al.. Modified Thornton model for magnetron sputtered zinc oxide: film structure and etching behaviour[J]. Thin Solid Films, 2003, 442(1-2): 80-85.

[6] [6] M Berginski, J Hüpkes, M Schulte, et al.. The effect of front ZnOAl surface texture and optical transparency on efficient light trapping in silicon thin-film solar cells[J]. J Appl Phys, 2007, 101(7): 074903.

[7] [7] J Hüpkes, B Rech, O Kluth, et al.. Surface textured MF-sputtered ZnO films for microcrystalline silicon-based thin-film solar cells[J]. Solar Energy Materials & Solar Cells, 2006, 90(18-19): 3054-3060.

[8] [8] S Fernndez, O Abril, F B Naranjo, et al.. High quality textured ZnOAl surfaces obtained by a two-step wet-chemical etching method for applications in thin film silicon solar cells[J]. Solar Energy Materials & Solar Cells, 2011, 95(8): 2281-2286.

[9] [9] K Ellmer, R Cebulla, R Wendt. Transparent and conducting ZnO(Al) films deposited by simultaneous RF- and DC-excitation of a magnetron[J]. Thin Solid Films, 1998, 317(1): 413-416.

[10] [10] K S Weiβenrieder, J Müller. Conductivity model for sputtered ZnO-thin film gas sensors[J]. Thin Solid Films, 1997, 300(1-2): 30-41.

[11] [11] W J Jeong, G C Park. Electrical and optical properties of ZnO thin film as a function of deposition parameters[J]. Solar Energy Materials & Solar Cells, 2001, 65(1-4): 37-45.

[12] [12] K C Park, D Y Ma, K H Kim. The physical properties of Al-doped zinc oxide films prepared by RF magnetron sputtering[J]. Thin Solid Films, 1997, 305(1-2): 201-209.

[13] [13] Zou Lu, Ye Zhizhen. Influence of growing parameter on the performance of ZnO film in MC sputtering[J]. Semiconductor Information, 2001, 38(6): 55-58.