Chinese Journal of Lasers, Volume. 40, Issue 7, 707004(2013)

Texturing Process with 355 nm Laser for Amorphous Silicon Film Solar Cell

Zhang Chao1,2、*, Zhang Qingmao1, Guo Liang1,3, Wu Yuwen1, and Lü Qitao4
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    In order to enhance conversion efficiency and stability of thin film amorphous silicon solar cells, the nanosecond pulse laser is used to make the transparent conducting films textured. Transparent conducting film′s electrical, optical and crystal structure characteristics are discussed with changing laser parameters, such as laser power density, frequency repetition, etching speed and filling spacing. A comparison is made with the performance of cells manufactured by different texturing ways. The experiment results indicate that when laser power density is 0.85×105 W/cm2, etching speed is 600 mm/s, repetition frequency is 50 kHz, and filling spacing is 0.012 mm, the textured structure of transparent conducting films has less square resistance and more effective light trapping. It effectively improves the absorption, and enhances the conversion efficiency of cells.

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    Zhang Chao, Zhang Qingmao, Guo Liang, Wu Yuwen, Lü Qitao. Texturing Process with 355 nm Laser for Amorphous Silicon Film Solar Cell[J]. Chinese Journal of Lasers, 2013, 40(7): 707004

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    Paper Information

    Category: materials and thin films

    Received: Jan. 25, 2013

    Accepted: --

    Published Online: Jun. 9, 2013

    The Author Email: Chao Zhang (zhchao85@163.com)

    DOI:10.3788/cjl201340.0707004

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