Optical Technique, Volume. 49, Issue 4, 390(2023)
A novel nano accuracy positioning system based on feedback of heterodyne laser interferometry with non-coaxial beams
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ZHANG Zhengyu, LIU Yuhan, LUO Jie, ZHAO Weiqian. A novel nano accuracy positioning system based on feedback of heterodyne laser interferometry with non-coaxial beams[J]. Optical Technique, 2023, 49(4): 390
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