Fig. 1. Diffraction efficiency of grating versus different structural parameters. (a) Period; (b) incident angle; (c) ridge height; (d) duty cycle

Fig. 2. Diffraction efficiency versus diffraction order and wavelength, where inset shows that 0 order diffraction energy is 0 under specified conditions

Fig. 3. AFM image of fabricated grating based on optimized parameters

Fig. 4. Schematic of SBC experimental device

Fig. 5. Spectra of laser array (a) before and (b) after SBC

Fig. 6. Output power versus working current, where inset shows energy distribution of output spot