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Chinese Journal of Lasers, Volume. 48, Issue 10, 1002112(2021)

Process Parameters of Direct Writing Polyimide by 1064 nm Fiber Laser

jin Wang1, Rudong Zhou3, Ning Zhang4, Junfeng Cheng1, Zheng Cao1, Qiang Wang1, Dun Wu1,5、**, and Chunlin Liu1,2、*
Author Affiliations
  • 1Jiangsu Key Laboratory of Environmentally Friendly Polymeric Materials, School of Materials Science and Engineering, Changzhou University, Changzhou, Jiangsu 213164, China
  • 2Changzhou University Huaide College, Jingjiang, Jiangsu 214500, China
  • 3CNOOC Changzhou E.P. Coatings Co., Changzhou, Jiangsu 213016, China
  • 4Changzhou Institute of Industry Technology, Changzhou, Jiangsu 213164, China
  • 5Materials Science and Engineering National Experimental Teaching Demonstration Center, Changzhou, Jiangsu 213164, China
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    Figures&Tables (12)
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    References (25)
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    Figures & Tables(12)
    Carbon formation by laser direct writing PI film. (a) Process diagram; (b) principle diagram

    Fig. 1. Carbon formation by laser direct writing PI film. (a) Process diagram; (b) principle diagram

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    Micro morphologies of product formed by laser direct writing PI film. (a) Surface morphology; (b) cross-section morphology

    Fig. 2. Micro morphologies of product formed by laser direct writing PI film. (a) Surface morphology; (b) cross-section morphology

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    Raman spectra of PI film before and after laser direct writing

    Fig. 3. Raman spectra of PI film before and after laser direct writing

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    XPS spectra of product formed by laser direct writing PI film. (a) XPS binding energy full spectrum; (b) high resolution C1s XPS spectrum

    Fig. 4. XPS spectra of product formed by laser direct writing PI film. (a) XPS binding energy full spectrum; (b) high resolution C1s XPS spectrum

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    Sheet resistance of product formed by laser direct writing PI film under different line spacing and spot diameter values

    Fig. 5. Sheet resistance of product formed by laser direct writing PI film under different line spacing and spot diameter values

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    Sheet resistance of product formed by laser direct writing PI film under different scanning speeds and pulse frequencies

    Fig. 6. Sheet resistance of product formed by laser direct writing PI film under different scanning speeds and pulse frequencies

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    SEM images of product formed by laser direct writing PI film under different laser powers. (a) 1.8 W; (b) 2.0 W; (c) 2.2 W; (d) 2.4 W; (e) 2.6 W; (f) 2.8 W

    Fig. 7. SEM images of product formed by laser direct writing PI film under different laser powers. (a) 1.8 W; (b) 2.0 W; (c) 2.2 W; (d) 2.4 W; (e) 2.6 W; (f) 2.8 W

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    Raman spectra and Raman peak intensity ratio of product formed by laser direct writing PI film under different laser powers. (a) Raman spectra; (b) Raman peak intensity ratio

    Fig. 8. Raman spectra and Raman peak intensity ratio of product formed by laser direct writing PI film under different laser powers. (a) Raman spectra; (b) Raman peak intensity ratio

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    Influence of laser power on conductivity of product formed by laser direct writing PI film

    Fig. 9. Influence of laser power on conductivity of product formed by laser direct writing PI film

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    Influence of laser power on the contact angle of product formed by laser direct writing PI film. (a) 1.8 W; (b) 2.0 W; (c) 2.2 W; (d) 2.4 W; (e) 2.6 W; (f) 2.8 W

    Fig. 10. Influence of laser power on the contact angle of product formed by laser direct writing PI film. (a) 1.8 W; (b) 2.0 W; (c) 2.2 W; (d) 2.4 W; (e) 2.6 W; (f) 2.8 W

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    • Table 1. Sheet resistance of product formed by laser direct writing PI film under different line spacing and spot diameter values

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      Table 1. Sheet resistance of product formed by laser direct writing PI film under different line spacing and spot diameter values

      Line spacing /mmSheet resistance /(Ω·sq-1)
      d=0.03 mmd=0.04 mmd=0.05 mmd=0.06 mmd=0.07 mm
      0.001102706762123
      0.00210112010285105
      0.003277321123184240
      0.005392591262345435
      0.007131524466925712608
      0.0101475312339673159738568

    • Table 2. Sheet resistance of product formed by laser direct writing PI film under different scanning speeds and pulse frequencies

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      Table 2. Sheet resistance of product formed by laser direct writing PI film under different scanning speeds and pulse frequencies

      Scanning speed /(mm·s-1)Sheet resistance /(Ω·sq-1)
      f=30 kHzf=35 kHzf=40 kHzf=45 kHzf=50 kHzf=55 kHz
      1001419161417503932
      15011073616973215
      2001469681726974
      25015910388767268
      300267155112958583
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    jin Wang, Rudong Zhou, Ning Zhang, Junfeng Cheng, Zheng Cao, Qiang Wang, Dun Wu, Chunlin Liu. Process Parameters of Direct Writing Polyimide by 1064 nm Fiber Laser[J]. Chinese Journal of Lasers, 2021, 48(10): 1002112

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    Paper Information

    Category: Laser Material Processing

    Received: Oct. 9, 2020

    Accepted: Nov. 23, 2020

    Published Online: May. 18, 2021

    The Author Email: Wu Dun (1348260409@qq.com), Liu Chunlin (chunlin@cczu.edu.cn)

    DOI:10.3788/CJL202148.1002112

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology