Chinese Journal of Lasers, Volume. 42, Issue 4, 416001(2015)
Optical Design of Fourier Transform Lens for Measurement of Illumination Pupil of Lithography Tools
References(4)
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[3] [3] Cai Yanmin, Wang Xiangzhao, Huang Huijie. Design of Wollaston prism used for polarization illumination system in ArF lithography tool[J]. Chinese J Lasers, 2014, 41(6): 0616002.
[4] [4] Zhang Yimo. Applied Optics[M]. The second edition. Beijing: China Machine Press, 1988. 497-500.
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Cai Yanmin, Wang Xiangzhao, Bu Yang, Huang Huijie. Optical Design of Fourier Transform Lens for Measurement of Illumination Pupil of Lithography Tools[J]. Chinese Journal of Lasers, 2015, 42(4): 416001
Paper Information
Category: rapid communications
Received: Nov. 11, 2014
Accepted: --
Published Online: Feb. 2, 2015
The Author Email: Yanmin Cai (caiyanmin@163.com)
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