Long range dynamic displacement: precision PGC with sub-nanometer resolution in an LWSM interferometer

Yisi Dong; Peng-Cheng Hu; Haijin Fu; Hongxing Yang; Ruitao Yang; Jiubin Tan

doi:10.1364/PRJ.442057

Photonics Research, Volume. 10, Issue 1, 59(2022)

Long range dynamic displacement: precision PGC with sub-nanometer resolution in an LWSM interferometer

Yisi Dong^1,2, Peng-Cheng Hu^1,2、*, Haijin Fu^1,2, Hongxing Yang^1,2, Ruitao Yang^1,2, and Jiubin Tan^1,2

Author Affiliations

¹Center of Ultra-precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, China

²Key Laboratory of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China

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Yisi Dong, Peng-Cheng Hu, Haijin Fu, Hongxing Yang, Ruitao Yang, Jiubin Tan, "Long range dynamic displacement: precision PGC with sub-nanometer resolution in an LWSM interferometer," Photonics Res. 10, 59 (2022)

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Paper Information

Category: Instrumentation and Measurements

Received: Aug. 31, 2021

Accepted: Nov. 2, 2021

Published Online: Dec. 13, 2021

The Author Email: Peng-Cheng Hu (hupc@hit.edu.cn)

DOI:10.1364/PRJ.442057

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology