Researching | Infrared-surface-plasmon-assisted thermal probe nanolithography using a radially polarized vortex and continuous-wave laser

Photonics Research, Volume. 13, Issue 8, 2046(2025)

Infrared-surface-plasmon-assisted thermal probe nanolithography using a radially polarized vortex and continuous-wave laser

Ruiguang Peng^1、*, Yan Meng², Jingda Wen³, Shijia Feng¹, and Qian Zhao⁴

Author Affiliations

¹Institute of New Materials and Advanced Manufacturing, Beijing Academy of Science and Technology, Beijing 100084, China

²School of Mechanical and Electronic Engineering, China University of Mining and Technology, Beijing 100083, China

³State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China

⁴State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China

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Ruiguang Peng, Yan Meng, Jingda Wen, Shijia Feng, Qian Zhao, "Infrared-surface-plasmon-assisted thermal probe nanolithography using a radially polarized vortex and continuous-wave laser," Photonics Res. 13, 2046 (2025)

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Paper Information

Category: Surface Optics and Plasmonics

Received: Dec. 16, 2024

Accepted: Apr. 28, 2025

Published Online: Jul. 18, 2025

The Author Email: Ruiguang Peng (pengruiguang@bjast.ac.cn)

DOI:10.1364/PRJ.551993

CSTR:32188.14.PRJ.551993

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology