Chinese Journal of Lasers, Volume. 51, Issue 20, 2002401(2024)
Study of Laser Ablation on 4H‑SiC by Three‑Dimensional Molecular Dynamics
Fig. 3. Lattice temperature field distributions and evolutions under different laser fluences. (a) 200 mJ/cm2; (b) 100 mJ/cm2; (c) 50 mJ/cm2; (d) 20 mJ/cm2
Fig. 4. Analysis of sectional structures. (a) Snapshots of sectional structure under different laser fluences; (b) removal depth and modification layer thickness versus laser fluence
Fig. 5. MD simulation for phase explosion. (a) Total energy during heating and cluster size distribution after explosive boiling; (b) snapshot of atomic configuration after homogeneous nucleation of superheated liquid and locally enlarged image
Fig. 6. Simulated cluster size distributions of ablation plumes. (a) Laser fluence of 20 mJ/cm2; (b) laser fluence of 50 mJ/cm2; (c) laser fluence of 100 mJ/cm2; (d) laser fluence of 200 mJ/cm2
Get Citation
Copy Citation Text
Haojie An, Jinshi Wang, Fengzhou Fang. Study of Laser Ablation on 4H‑SiC by Three‑Dimensional Molecular Dynamics[J]. Chinese Journal of Lasers, 2024, 51(20): 2002401
Category: Laser Micro-Nano Manufacturing
Received: Dec. 25, 2023
Accepted: Feb. 5, 2024
Published Online: Oct. 12, 2024
The Author Email: Fang Fengzhou (fzfang@tju.edu.cn)
CSTR:32183.14.CJL231570