Acta Physica Sinica, Volume. 69, Issue 8, 084201-1(2020)
Figures & Tables(10)
Fig. 2. SEM images of original samples: (a) Overall picture; (b), (c) partial enlarged pictures in (a).
Fig. 3. Experimental pictures of different pulse numbers at 2000 x optical microscope: (a) 1; (b) 2; (c) 5; (d) 10; (e) 15; (f) 20; (g) 30; (h) 50; (i) original sample coated with Al particles.
Fig. 4. SEM images of particle removal under different pulses: (a) 1; (b) 2; (c) 5; (d) 10; (e) 15; (f) 20; (g) 30; (h) 50.
Fig. 5. SEM images of particle fragmentation and melting phenomenon: (a) Fragmentation; (b) the enlargement of fragmentation in (a); (c) phase transition 1; (d) phase transition 2
Fig. 6. Propagation of shock wave: (a) Changes in shock wavefront pressure with transmission radius; (b)
Fig. 7. Finite element analysis-stress distribution in the particles at different times: (a) 103 MPa; (b) 743 MPa; (c) 348 MPa; (d) 165 MPa.
Fig. 8. Changes in shock wave temperature with wavefront propagation radius.
Table 1.
Related parameters of Al particles and silicon substrate.
Al颗粒和Si基底的相关参数
View tableView in ArticleTable 1.
Related parameters of Al particles and silicon substrate.
Al颗粒和Si基底的相关参数
参数 导热系数/pW·μm–1·K–1 密度/kg·μm–3 比热容/pJ·kg–1·K–1 泊松比 弹性模量/MPa 热膨胀系数 铝 237 × 106 2700 × 10–18 880 × 1012 0.330 70 × 103 23.21 × 10–6 Si 150 × 106 2328 × 10–18 618 × 1012 0.278 190 × 103 0.50 × 10–6
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Ju Luo, Guo-Ying Feng, Jing-Hua Han, Xiong Shen, Li-Jun Zhang, Kun-Yan Ding.
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Received: Dec. 20, 2019
Accepted: --
Published Online: Nov. 24, 2020
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