Collection Of theses on high power laser and plasma physics, Volume. 3, Issue 1, 80(2005)
Development of five-DOF integrated stage with nano-precision positioning
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[6] [6] Paros J M, Weisbord L. How to Design Flexure Hinges. Machine Design, 1965, 27: 151～156
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Development of five-DOF integrated stage with nano-precision positioning[J]. Collection Of theses on high power laser and plasma physics, 2005, 3(1): 80
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