Collection Of theses on high power laser and plasma physics, Volume. 3, Issue 1, 80(2005)
Development of five-DOF integrated stage with nano-precision positioning
This paper presents a new type of nanopositioning stage which has five degree of freedom; the stage is driven by piezoelectric actuators and guided by compliant hinges. The stage can be fabricated with an integrated metal through wire electro discharge machining and is compact. The equation of compliant mechanisms and a design case is also presented in this paper.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Development of five-DOF integrated stage with nano-precision positioning[J]. Collection Of theses on high power laser and plasma physics, 2005, 3(1): 80
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