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Laser & Optoelectronics Progress, Volume. 58, Issue 5, 0531001(2021)

Research on Film Thickness Uniformity of Electron Beam Evaporation Spherical Fixture System

Yonggang Pan1、*, Zheng Liu1, Ben Wang2, Sibao Zhang1, and Lü Chenrui1
Author Affiliations
  • 1Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an , Shaanxi 710119, China
  • 2Shanghai Mifeng Laser Technology Co., Ltd., Shanghai 200120, China
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    Article index updated: Mar. 15, 2025

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    Yonggang Pan, Zheng Liu, Ben Wang, Sibao Zhang, Lü Chenrui. Research on Film Thickness Uniformity of Electron Beam Evaporation Spherical Fixture System[J]. Laser & Optoelectronics Progress, 2021, 58(5): 0531001

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    Paper Information

    Category: Thin Films

    Received: Jul. 7, 2020

    Accepted: Aug. 27, 2020

    Published Online: Apr. 19, 2021

    The Author Email: Pan Yonggang (pyg_optics@163.com)

    DOI:10.3788/LOP202158.0531001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology