Piezoelectrics & Acoustooptics, Volume. 47, Issue 3, 405(2025)

Study on Signal Reading Method for a MEMS Vibrating Ring Gyroscope

KOU Zhiwei1,2, CUI Xiaoming1, YIN Yu1, LI Na1,2, and CAO Huiliang3
Author Affiliations
  • 1College of Electric Power,Inner Mongolia University of Technology,Hohhot 010051,China
  • 2Inner Mongolia Key Laboratory of Electromechanical Control,Hohhot 010051,China
  • 3Key Laboratory of Instrumentation Science & Dynamic Measurement,Ministry of Education,North University of China,Taiyuan 030051,China
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    References(6)

    [2] [2] JIA Jia,DING Xukai,QIN Zhengcheng,et al. Overview and analysis of MEMS Coriolis vibratory ring gyroscope[J]. Measurement,2021,182:109704.

    [12] [12] VISCONTI A,DIAZZI F,ZHANG Guangzhao. Method and device for demodulating gyroscope signals:US11105632[P]. 2021-08-31.

    [14] [14] KUZNETSOV N V,BELYAEV Y V,STYAZHKINA A V,et al. Effects of PLL architecture on MEMS gyroscope performance[J]. Gyroscopy and Navigation,2022,13(1):44-52.

    [15] [15] LV Risheng,FU Qiang,CHEN Weiping,et al. A digital interface ASIC for triple-axis MEMS vibratory gyroscopes[J]. Sensors,2020,20(19):5460.

    [16] [16] REN Mingyuan,XU Honghai,HAN Xiaowei,et al. Low noise interface ASIC of micro gyroscope with ball-disc rotor[J]. Sensors,2020,20(4):1238.

    [17] [17] ZHANG Wenbo,YIN Liang,WANG Yihang,et al. A low-noise interface ASIC for MEMS disk resonator gyroscope[J]. Micromachines,2023,14(6):1256.

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    KOU Zhiwei, CUI Xiaoming, YIN Yu, LI Na, CAO Huiliang. Study on Signal Reading Method for a MEMS Vibrating Ring Gyroscope[J]. Piezoelectrics & Acoustooptics, 2025, 47(3): 405

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    Paper Information

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    Received: Mar. 11, 2025

    Accepted: --

    Published Online: Jul. 11, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.03.001

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