Piezoelectrics & Acoustooptics, Volume. 47, Issue 3, 405(2025)
Study on Signal Reading Method for a MEMS Vibrating Ring Gyroscope
A ring-diode capacitive detection circuit based on square-wave modulation was designed for a symmetrically sensitive interface with an arc-shaped differential capacitive electrode,focusing on the dynamic characteristics and electromechanical energy conversion features of a microelectromechanical silicon-based vibrating ring gyroscope. First,a double-layer fully symmetrical arc-shaped differential capacitive electrode interface scheme with the electrode center axis coinciding with the principal axis of the working mode is proposed,and an electrical sensitivity model of the mechanical vibration parameters of the ring-shaped sensitive structure is studied. Next,a ring-diode capacitive detection circuit with a square-wave carrier form is proposed to avoid coupling interference from co-frequency driving signals. It modulates weak capacitive detection signals onto a high-frequency carrier and then demodulates them to obtain the output signal of the microgyroscope. Subsequently,a control model for reading sensitive signals in the detection mode was designed,and its stability was analyzed. Additionally,an electromechanical control model for the signal-sensing system was developed and validated through simulation analysis. Finally,a control circuit for reading sensitive signals was designed based on the aforementioned scheme,and its performance was tested. The experimental results showed that the control scheme of this sensitive interface detection circuit can quickly and effectively read sensitive signals,and the forward scale factor was 0.593 9 mV/[(°)·s-1],whereas the reverse scale factor was 0.594 6 mV/[(°)·s-1],resulting in a scale factor asymmetry of merely 0.12%.
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KOU Zhiwei, CUI Xiaoming, YIN Yu, LI Na, CAO Huiliang. Study on Signal Reading Method for a MEMS Vibrating Ring Gyroscope[J]. Piezoelectrics & Acoustooptics, 2025, 47(3): 405
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Received: Mar. 11, 2025
Accepted: --
Published Online: Jul. 11, 2025
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