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Laser & Optoelectronics Progress, Volume. 55, Issue 2, 020006(2018)

Research Progress of Optical Phased Array Technology

Yuewu Yan1,2, Junming An1,2, Jiashun Zhang、*, Liangliang Wang1, Xiaojie Yin1, Yuanda Wu1,2, and Yue Wang1
Author Affiliations
  • 1 State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 2 College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (13)
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    References (45)
    Cited By (8)
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    Figures & Tables(13)
    Schematic of optical phased array

    Fig. 1. Schematic of optical phased array

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    Schematic of the beam scanner in Ref. [16]

    Fig. 2. Schematic of the beam scanner in Ref. [16]

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    Ten waveguide optical phased array

    Fig. 3. Ten waveguide optical phased array

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    Schematic of the beam scanning component

    Fig. 4. Schematic of the beam scanning component

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    Schematic of the 16-channel grating array. (a) Device structure; (b) angle alignment of longitudinal axis and transverse axis

    Fig. 5. Schematic of the 16-channel grating array. (a) Device structure; (b) angle alignment of longitudinal axis and transverse axis

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    Device structure and simulation. (a) Schematic of the silicon waveguide based optical phased array; (b) beam propagation simulation

    Fig. 6. Device structure and simulation. (a) Schematic of the silicon waveguide based optical phased array; (b) beam propagation simulation

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    Nanophotonic phased array system

    Fig. 7. Nanophotonic phased array system

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    Device structure and SEM scanning graphs. (a) 3D rendering of the optical phased array; SEM graphs of (b) cascaded phase shifter architecture, (c) close-up of the thermal phase shifters, (d) full-etch silicon grating based antennas

    Fig. 8. Device structure and SEM scanning graphs. (a) 3D rendering of the optical phased array; SEM graphs of (b) cascaded phase shifter architecture, (c) close-up of the thermal phase shifters, (d) full-etch silicon grating based antennas

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    Schematic of the phased array antenna[35]

    Fig. 9. Schematic of the phased array antenna[35]

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    Schematic of optical phased array composed of HCG mirrors

    Fig. 10. Schematic of optical phased array composed of HCG mirrors

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    Schematic of MEMS phased array composed of HCG

    Fig. 11. Schematic of MEMS phased array composed of HCG

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    Schematic of phased array lidar

    Fig. 12. Schematic of phased array lidar

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    • Table 1. Comparison of three kinds of optical phased array

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      Table 1. Comparison of three kinds of optical phased array

      TypeSteeringspeed /kHzControlvoltage /VSteeringangle /(°)Integration
      LC5[43]6.882Low
      Waveguide100[20]1051High
      MEMS632[42]102High
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    Yuewu Yan, Junming An, Jiashun Zhang, Liangliang Wang, Xiaojie Yin, Yuanda Wu, Yue Wang. Research Progress of Optical Phased Array Technology[J]. Laser & Optoelectronics Progress, 2018, 55(2): 020006

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    Paper Information

    Category: General

    Received: Jul. 28, 2017

    Accepted: --

    Published Online: Sep. 10, 2018

    The Author Email:

    DOI:10.3788/LOP55.020006

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology