[1] [1] Cheng Haobo. Independent variables f optical surfacing systems[M]. Heidelberg: Springer, 2014: 1120.

[2] Wang Zhenzhong, Shi Chenchun, Zhang Pengfei, . Recent progress of advanced optical manufacturing technology[J]. Journal of Mechanical Engineering, 57, 23-56(2021).

[3] Fan Fei, Xu Xi, Xu Qiao, . Progress on ultra precision manufacturing technology of large-aperture high-power laser optics[J]. Opto-Electronic Engineering, 47, 200135(2020).

[4] Xu Deyan. Optical processing status of NIF[J]. Laser & Optoelectronics Progress, 41, 13-14,12(2004).

[5] Ji Shiming, Chen Weiqiang, Jin Mingsheng, . Research on motion model for gasbag polishing with continuous precession process[J]. Journal of Mechanical & Electrical Engineering, 29, 377-380,416(2012).

[6] Ji Shiming, Jin Mingsheng, Zhang Xian, . Novel gasbag polishing technique for free-form mold[J]. Journal of Mechanical Engineering, 43, 2-6(2007).

[7] Huang Zhi, Zhou Tao, Wu Xiang, . SiC optical element processing properties under robot bonnet polishing[J]. Journal of Xi'an Jiaotong University, 54, 22-29(2020).

[8] Lin Zewen, Wang Zhenzhong, Huang Xuepeng, . Influence of robotic structural deformation on bonnet polishing removal function[J]. High Power Laser and Particle Beams, 33, 051001(2021).

[9] [9] Campbell J H, HawleyFedder R A, Stolz C J, et al. NIF optical materials fabrication technologies: an overview[C]Proceedings of the SPIE 5341, Optical Engineering at the Lawrence Liverme National Labaty II: The National Ignition Facility. 2004: 84101.

[10] [10] Li Aimin. Research on the removal acteristics process of computercontrolled gadget polishing[D]. Changsha: National University of Defense Technology, 2003: 2130

[11] Chen Wei. Analysis of impact factors on frequency distribution of optic surface[J]. Journal of Applied Optics, 32, 967-970(2011).

[12] [12] Jiang Tao. Research on the precision of bon polishing machine tool the intermediate frequency control of the component surface[D]. Xiamen: Xiamen University, 2015: 2535

[13] Yu Guoyu, Walker D, Li Hongyu. Implementing a grolishing process in Zeeko IRP machines[J]. Applied Optics, 51, 6637-6640(2012).

[14] Dunn C R, Walker D D. Pseudo-random tool paths for CNC sub-aperture polishing and other applications[J]. Optics Express, 16, 18942-18949(2008).

[15] Wang Chunjin, Wang Zhenzhong, Wang Quanjin, et al. Improved semirigid bonnet tool for high-efficiency polishing on large aspheric optics[J]. The International Journal of Advanced Manufacturing Technology, 88, 1607-1617(2017).

[16] [16] Pan Ri. Research on polishing technology of largeaperture aspheric surface highefficiency controllable airbag[D]. Xiamen: Xiamen University, 2014: 7100

[17] [17] Wang Chunjin. Research on highefficiency polishing technology f semiflexible bon of largeaperture optical components[D]. Xiamen: Xiamen University, 2015: 2050

[18] Ahmadian H, Mottershead J E, James S, et al. Modelling and updating of large surface-to-surface joints in the AWE-MACE structure[J]. Mechanical Systems and Signal Processing, 20, 868-880(2006).

[19] [19] Pan Zengxi, Zhang Hui. Analysis suppression of chatter in robotic machining process[C]2007 International Conference on Control, Automation Systems. 2007: 595600.

[20] Chen Yonggang, Fan Kaifu, Tan Jingjing, . Research on jitter of industrial six-axis robot terminal[J]. Research and Exploration in Laboratory, 38, 44-47(2019).

[21] Wang Zhanxi, Zhang Xiaoyu, Li Feifei, . Review on the research developments of robot machining systems and cutting chatter behaviors[J]. Journal of Vibration and Shock, 36, 147-155,188(2017).

[22] Fang Qiang, Li Chao, Fei Shaohua, . Stability analysis of robot boring system[J]. Acta Aeronautica et Astronautica Sinica, 37, 727-737(2016).

[23] Pan Ri, Zhao Wanying, Wang Zhenzhong, et al. Research on an evaluation model for the working stiffness of a robot-assisted bonnet polishing system[J]. Journal of Manufacturing Processes, 65, 134-143(2021).

[24] [24] Alberts T E, Dickerson S L, Book W J. On the transfer function modeling of flexible structures with distributed damping[J]. Gegia Institute of Technology, 1986.

[25] [25] He Xingshu. Mechanical vibration[M]. Shanghai: Shanghai Jiaotong University Press, 1985

[26] [26] Wu Weiming. Study on the stiffness damping acteristics of annular rubbersilicone oil damper[D]. Nanjing: Nanjing University of Aeronautics Astronautics, 2018: 4060