Optical Communication Technology, Volume. 46, Issue 6, 6(2022)
CMOS-compatible silicon nitride surface grating coupler with high efficiency
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HAN Fengyang, WANG Linghua, ZHANG Yazhen, HUANG Jiwei. CMOS-compatible silicon nitride surface grating coupler with high efficiency[J]. Optical Communication Technology, 2022, 46(6): 6
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Received: Feb. 24, 2022
Accepted: --
Published Online: Jan. 28, 2023
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