Laser & Optoelectronics Progress, Volume. 58, Issue 16, 1600002(2021)
Research on Microscopic 3D Measurement System Based on Focus Variation
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Fig. 2. Multi-focus image sequence acquired by microscopic 3D measurement system based on focus variation
Table 1. Measurement characteristics of non-contact surface morphological measurement algorithms
View tableTable 1. Measurement characteristics of non-contact surface morphological measurement algorithms
Algorithm Resolution /nm Detection range along Z-axis direction Measurement speed Measurement requirement Vertical Parallel SEM 1 10 -- Medium Environment is vacuum and sample is conductive STM 0.01 0.5 μm Slow Sample surface is smooth and conductive and damping devices are needed SNOM 1 10 -- Slow Sample surface is smooth and working distance is short AFM 0.01 0.1 μm Slow Sample surface is smooth PSIM 1 -- μm -- Sample surface is super smooth with high precision SWLIM 1 100 mm Fast Sample surface is super smooth with high precision DHM 1 100 μm Fast Sample surface is non-scattering FVM 10 500 mm Fast Sample is not transparent and surface is not high precision
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Minghao Shang, Feihong Yu. Research on Microscopic 3D Measurement System Based on Focus Variation[J]. Laser & Optoelectronics Progress, 2021, 58(16): 1600002
Paper Information
Category: Reviews
Received: Oct. 27, 2020
Accepted: Dec. 8, 2020
Published Online: Jul. 16, 2021
The Author Email: Feihong Yu (feihong@zju.edu.cn)
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