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Piezoelectrics & Acoustooptics, Volume. 46, Issue 4, 555(2024)

Design and Analysis of Large-Stroke Decoupling Micro-Positioning Platform

HU Gaofeng1...2, LU Junti1, JIA Chuanming1, and QI Houjun12 |Show fewer author(s)
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    HU Gaofeng, LU Junti, JIA Chuanming, QI Houjun. Design and Analysis of Large-Stroke Decoupling Micro-Positioning Platform[J]. Piezoelectrics & Acoustooptics, 2024, 46(4): 555

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    Paper Information

    Received: Apr. 8, 2024

    Accepted: --

    Published Online: Sep. 18, 2024

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2024.04.023

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology