Piezoelectrics & Acoustooptics, Volume. 46, Issue 4, 555(2024)
Design and Analysis of Large-Stroke Decoupling Micro-Positioning Platform
To address the issues of limited stroke and significant coupling error in currently developed micro-positioning platforms, a two-degree-of-freedom micro-positioning platform, powered by piezoelectric actuators(PEA), is proposed. Additionally, a three-stage displacement amplifier is designed, which combines a two-stage lever amplification mechanism and Scott-Russell mechanism in series, to extend the operational stroke. The motion coupling error is eliminated by using a parallel-axis straight-circle flexible hinge and double-compound moving pair in parallel configuration. Finally, the performance of the platform is analyzed and tested via finite element simulation and experiment. The results show that the operating stroke of the designed micro-positioning platform is over 170 μm×170 μm, coupling error is within 1.2%, displacement resolution is 5 nm, and signal tracking error is 2.16%. This verifies the positioning accuracy and accuracy of the model.
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HU Gaofeng, LU Junti, JIA Chuanming, QI Houjun. Design and Analysis of Large-Stroke Decoupling Micro-Positioning Platform[J]. Piezoelectrics & Acoustooptics, 2024, 46(4): 555
Received: Apr. 8, 2024
Accepted: --
Published Online: Sep. 18, 2024
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