Fig. 1. Structure schematic of temperature sensor. (a) Three-dimensional view; (b) top view; (c) side view

Fig. 2. Vertical electric field, metal hypersurface and metal reflective layer current distributions of superstructure. Current distributions of (a) vertical electric field, (b) metal hypersurface and (c) metal reflective layer at 0.87 THz; current distributions of (d) vertical electric field, (e) metal hypersurface and (f) metal reflective layer at 1.95 THz

Fig. 3. Experimental design of terahertz temperature sensor based on amorphous STO film with graphene. (a) Terahertz temperature sensor fabrication process; (b) terahertz wave reflection image on temperature sensor; (c) Raman spectra and XRD patterns of amorphous STO and SiO₂ glass

Fig. 4. Raman spectra of terahertz temperature sensor. (a) Raman spectrum of h₁; (b) Raman spectrum of h₂

Fig. 5. Simulated and experimental absorption spectra of h₀. (a) Simulated and experimental absorption spectra of h₀; (b) absorption spectra of h₀ at different temperatures

Fig. 6. Performance testing of terahertz temperature sensor. (a) Terahertz absorption spectra of h₁ at different temperatures; (b) terahertz absorption spectra of h₂ at different temperatures; (c) simulated absorption spectra of h₁ at different dielectric constants; (d) simulated absorption spectra of h₂ at different Fermi energy; (e) linear fitting of ∆f versus ∆t of h₁; (f) linear fitting of ∆T versus ∆t of h₂

Fig. 7. Experimental sample diagram and test apparatus. (a) Physical sample; (b) enlarged view of physical sample; (c) terahertz time-domain spectrometer