Acta Optica Sinica, Volume. 20, Issue 6, 843(2000)
Measuring Method for Topography of DOE Based on Dual-Path Two-Wavelength Phase Shifting Interferometric Microscopy
References(4)
[1] [1] Korner T, Sheridan J T, Schwider J. Interferometric inspection of fine deep surface relief gratings. Optik, Annual Report 1993, 104
[2] [2] Schwider J, Falkenstorfer O. Twyman-Green interferometer for testing micro-spheres. Optik, Annual Report 1994, 60～64
[3] [3] Wyant J C. Testing aspheric using two-wavelength holography. Appl. Opt., 1971, 10(9):2113～2118
[5] [5] Greivenkamp J E. Sub-Nyquist interferometry. Appl. Opt., 1987, 26(24):5245～5258
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[in Chinese], [in Chinese], [in Chinese]. Measuring Method for Topography of DOE Based on Dual-Path Two-Wavelength Phase Shifting Interferometric Microscopy[J]. Acta Optica Sinica, 2000, 20(6): 843
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