Laser & Optoelectronics Progress, Volume. 61, Issue 19, 1913013(2024)

Recent Advances in and Prospects of Programmable Silicon Multifunctional Integrated Photonic Chips (Invited)

Ciyuan Qiu, Ning Ma, Yu Chen, and Yikai Su*
Author Affiliations
  • State Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Jiao Tong University, Shanghai 200240, China
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    Figures & Tables(11)
    Schematic diagram for programmable, multifunctional integrated photonic chip
    Device characteristics of three typical structures. (a)(b) Schematic diagram and transmission spectrum of All-pass micro-ring resonator; (c)(d) schematic diagram and transmission spectra of Add-drop micro-ring resonator; (e)(f) schematic diagram and transmission spectra of MZI structure
    Schematic and operation modes of a reconfigurable a silicon micro-ring switch[27,31]. (a) Device diagram; (b) scanning electron microscope figure; (c) transmission spectra of a switch in block/pass mode; (d) transmission spectra in pass/block mode; (e) transmission spectra inpass/pass mode; (f) method of calculating product based on microring cascade
    Programmable and multifunctional optical logic computing chip based on multi-wavelength configuration. (a) 2×2 chip structure diagram[22]; (b) picture of packaged 2×2 chip[22]; (c) 2×2 chip logic operation result[22]; (d) 1×4 chip structure diagram[25]; (e) 1×4 chip microscope image[25]; (f) 1×4 chip logic operation result[25]
    Programmable and multifunctional optical logic computing chip based on single-wavelength configuration. (a) Based on 1×1 multi-input microring optical switch chip structure diagram[29]; (b) 1×1 chip spectrogram[29]; (c) true table[29]; (d) structure diagram of programmable computing chip based on 3×4 optical switch[32]; (e) 3×4 optical switch chip microscope image[32]; (f) calculated results of a 3×4 optical switch chip[32]
    Resonator based forward optical signal processing chips. (a) Structure diagram of a programmable, multifunctional optical signal processing chip based on 8×8 micro-disk[58]; (b) programmable optical beamforming function[58]; (c) programmable optical pulse shaper function[58]; (d) structure diagram of a programmable optical signal processing chip based on 6 microring resonators[20]; (e) programmable delay function[20]
    MZI based forward optical signal processing chips. (a) Programmable 8×8 silicon optical signal processing chip[63]; (b) MIMO descrambler function[63]; (c) programmable optical signal processing chip based on cascaded MZI couplers and PDs[61]; (d) arbitrary waveform generation function[61]
    Recirculating optical signal processing chips based on square or triangular waveguide meshes. (a) Silicon nitride optical information processing chip based on square waveguide meshes[34]; (b) band-stop filter[34]; (c) band-pass filter[34]; (d) silicon nitride optical information processing chip based on triangular waveguide meshes[23]; (e) design of a silicon nitride optical information processing chip layout[23]; (f) reflection spectra of single ring resonator[23]; (g) reflection spectrum of double ring resonator[23]
    Recirculating optical signal processing chips based on hexagonal waveguide meshes. (a) Layout of a silicon programmable optical signal processing chip based on the 7-cell hexagonal waveguide meshes[45]; (b) programmable structure[45]; (c) optical filter[45]; (d) layout of a silicon programmable optical signal processing chip based on the 72-cell hexagonal waveguide meshes[55]; (e) chip image after packaging[55]; (f) optical transfer function[55]; (g) microwave photon filtering function[55]
    • Table 1. Typical silicon-based programmable multifunctional optical logic computing chip partly based on microring optical switches

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      Table 1. Typical silicon-based programmable multifunctional optical logic computing chip partly based on microring optical switches

      StructureModulation schemeNumber of operandsRequired wavelengthsSpeedNumber offunctions
      2×2 micro-ring switch array [26Carrier injection22500 Mbit/s8
      2×2 micro-ring switch array [22Carrier depletion223 Gbit/s8
      1×4 micro-ring switch array [24Thermal4210 Kbit/s6
      1×3 micro-ring switch array [25Carrier injection32100 Mbit/s8
      2×2 micro-ring switch array and PDs [33Carrier injection21270 Mbit/s8
      1×1 multi-input micro-ring switch [29Thermal211 Kbit/s3
      3×4 micro-ring switch array [32Thermal5110 Kbit/s9
    • Table 2. A partial list of typical silicon reconfigurable, multifunctional optical signal processors

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      Table 2. A partial list of typical silicon reconfigurable, multifunctional optical signal processors

      StructureMaterialTuning schemeNumber of PUCsSize /mm2PappliedFunction
      Micro-disk array [58SiTO640.16~mWTime delay, beamforming, AWG
      Micro-ring array [20SiTO60.576~mWFilter, switching, time delay, differentiator
      Bragg grating [57SiEO10.3~mWDifferentiator, frequency identification
      MZI array [40Si3N4TO1690~0.5 WTime delay, AWG, OTDM
      MZI array [41Si3N4TO1690~0.5 WHilbert transformer, filter, differentiator.
      MZI array [63SiTO209.75~27 mWSwitching, filter, optical MIMO descrambler
      MZI array [61SiTO244.9~22 mWTime delay, beamforming, AWG
      Square mesh cells [34Si3N4TO924.5~0.25 WFilter, time delay, hilbert transformer;
      Triangular mesh cells [23Si3N4TO5/~0.35 WFilter
      Hexagonal mesh cells [64SiTO194.8/Filter, router, optical neural network
      Hexagonal mesh cells [4547SiTO30300/20 different functionalities and self-configuration
      Hexagonal mesh cells [55SiTO304320~mW12 main functionalities
      Hexagonal mesh cells [59SiMEMS738.10Filter
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    Ciyuan Qiu, Ning Ma, Yu Chen, Yikai Su. Recent Advances in and Prospects of Programmable Silicon Multifunctional Integrated Photonic Chips (Invited)[J]. Laser & Optoelectronics Progress, 2024, 61(19): 1913013

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    Paper Information

    Category: Integrated Optics

    Received: Jul. 1, 2024

    Accepted: Aug. 13, 2024

    Published Online: Oct. 15, 2024

    The Author Email: Yikai Su (yikaisu@sjtu.edu.cn)

    DOI:10.3788/LOP241580

    CSTR:32186.14.LOP241580

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