Fig. 1. Schematic diagram of collision between particles and sensitive structures

Fig. 2. Schematic diagram of gas molecule motion direction and plane intersection point

Fig. 3. Schematic diagram of inertial sensor electrode cage and test mass

Fig. 4. Flowchart of gas molecule single collision tracking

Fig. 5. Flowchart of gas molecular trajectory simulation over a time interval

Fig. 6. Trajectory simulation diagram of a single gas molecule over different time periods

Fig. 7. Distribution diagram of acceleration component of test mass induced by residual gas collision over time

Fig. 8. Residual gas acceleration spectral density (ASD) at a pressure of 10⁻⁶ Pa

Fig. 9. Residual gas acceleration noise (ASD) under different pressures

Fig. 10. Translational and rotational noise of residual gas under different temperatures

Fig. 11. Variation of translational and rotational power spectral density with resprect to the gap-to-edge length-ratio平动和转动功率谱密度随间隙边长比的变化

Fig. 12. Variation of along the x-axis with respect to the gap size along the y-axisx轴随y轴间隙大小的变化