Chinese Journal of Lasers, Volume. 47, Issue 10, 1006003(2020)

Nearly-Ballistic Optimization Design of High-Speed Uni-Traveling-Carrier Photodiodes

Zhen Zheng1, Hao Ran2, Xing Dong3, Feng Zhihong3, and Jin Shangzhong2
Author Affiliations
  • 1College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, Zhejiang 310007, China
  • 2College of Optical and Electronic Technology, China Jiliang University, Hangzhou, Zhejiang 310018, China
  • 3No.13 Research Institute of China Electronics Technology Group Corporation, Shijiazhuang, Hebei 0 50051, China
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    Figures & Tables(10)
    Doping interfaces. (a) Doping interface of UTC-PD and MUTC-PD; (b) doping interface of NB-MUTC-PD
    3 dB bandwidths of three devices at reverse bias voltage of 2 V and incident light intensity of 1×104 W/cm2
    Physical properties of three devices under reverse bias voltage of 2 V. (a) Band structure; (b) internal electric field intensity
    Internal electric field intensity at different reverse bias voltages. (a) MUTC-PD; (b) NB-MUTC-PD
    3 dB bandwidths of NB-MUTC-PD and MUTC-PD at different reverse bias voltages (incident light intensity is 1×104 W/cm2)
    3 dB bandwidth of NB-MUTC-PD at different incident light intensities
    Effect of light intensity on properties of NB-MUTC-PD. (a) Electron concentration; (b) energy band; (c) internal electric field intensity
    Effect of voltage on properties of NB-MUTC-PD under high lighting condition. (a) Electron concentration distribution; (b) energy band structure; (c) electric field distribution
    Variation of DC photocurrent density of NB-MUTC-PD and MUTC-PD under different reverse bias voltages with light intensity
    • Table 1. Epitaxial layer structure of NB-MUTC-PD

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      Table 1. Epitaxial layer structure of NB-MUTC-PD

      LayerMaterialThickness /(10-10 m)Doping level /cm-3Doping type
      p-contact layerIn0.53Ga0.47As4003×1019p
      Diffusion blockInGaAsP (Q=1.1 eV)2002×1019p
      Graded absorption layerIn0.53Ga0.47As30001×1019 (T)-1×1016 (B)p
      Depletion absorption layerIn0.53Ga0.47As8001×1016p
      Spacer layer ⅠInGaAsP (Q=1.4 eV)1502×1016n
      Spacer layer ⅡInGaAsP (Q=1.1 eV)1502×1016n
      Collector layerInP28002×1016n
      Charge layer ⅠInP2001×1018p
      Charge layer ⅡInP1002×1016p
      Charge layer ⅢInP1006×1018n
      n-contact layerInP40002×1019n
      Diffusion blockIn0.52Al0.48As2000i
      SubstrateS.I.InP
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    Zhen Zheng, Hao Ran, Xing Dong, Feng Zhihong, Jin Shangzhong. Nearly-Ballistic Optimization Design of High-Speed Uni-Traveling-Carrier Photodiodes[J]. Chinese Journal of Lasers, 2020, 47(10): 1006003

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    Paper Information

    Category: Fiber optics and optical communication

    Received: Mar. 26, 2020

    Accepted: --

    Published Online: Oct. 9, 2020

    The Author Email:

    DOI:10.3788/CJL202047.1006003

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