Optics and Precision Engineering, Volume. 19, Issue 4, 836(2011)
Feed-forward and feed-back controller for large-range and high-speed AFM
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CHEN Dai-xie, YIN Bo-hua, LIN Yun-sheng, CHU Ming-zhang, HAN Li. Feed-forward and feed-back controller for large-range and high-speed AFM[J]. Optics and Precision Engineering, 2011, 19(4): 836
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Received: Aug. 27, 2010
Accepted: --
Published Online: Jun. 14, 2011
The Author Email: CHEN Dai-xie (chendaixie@mail.iee.ac.cn)
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