Design of a Multipoint Scanning Microscope Using Cascaded Flexible Gratings

Yanwei Fu; Jiaqing Zeng; Wanzhuo Ma; Dongdong Han; Shaoqian Tian; Zhi Liu; Xianzhu Liu; Huilin Jiang

doi:10.3788/AOS241053

Acta Optica Sinica, Volume. 44, Issue 21, 2111002(2024)

Design of a Multipoint Scanning Microscope Using Cascaded Flexible Gratings

Yanwei Fu¹, Jiaqing Zeng¹, Wanzhuo Ma^1、*, Dongdong Han², Shaoqian Tian¹, Zhi Liu¹, Xianzhu Liu¹, and Huilin Jiang¹

¹Institute of Space Optoelectronics Technology, Changchun University of Science and Technology, Changchun 130022, Jilin , China

²College of Electronic Science & Engineering, Jilin University, Changchun 130015, Jilin , China

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Figures & Tables(17)

Fig. 1. Scanning principle of cascaded elastic grating

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$Relationship of stretching force and diffraction spot displacement$

Fig. 2. Relationship of stretching force and diffraction spot displacement

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$Relationship of stretching force and diffraction spot displacement. (a) ΔSy; (b) ΔSz$

Fig. 3. Relationship of stretching force and diffraction spot displacement. (a) $Δ S_{y}$ ; (b) $Δ S_{z}$

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Fig. 4. Absorption of PDMS film

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$Relationship between groove depth and diffraction efficiency of different order spots. (a) 2nd; (b) 0th, 1st, and 3rd$

Fig. 5. Relationship between groove depth and diffraction efficiency of different order spots. (a) 2nd; (b) 0th, 1st, and 3rd

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Fig. 6. Schematic of cascaded flexible gratings multi-point scanning system

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Fig. 7. Initial structure and imaging quality evaluation diagrams of objective lens. (a) 3D layout of initial structure; (b) Seidel diagram of initial structure; (c) light spot sequence diagram of image plane; (d) MTF curves of initial structure

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Fig. 8. Structure and imaging quality evaluation diagrams of optimized objective lens. (a) 3D layout of optimized objective lens; (b) Seidel diagram of optimized objective lens; (c) light spot sequence diagram of image plane; (d) MTF curves of optimized objective lens

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Fig. 9. Structure and imaging quality evaluation diagrams of illumination light path. (a) 3D layout of illumination light path; (b) Seidel diagram of illumination light path

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$Diffraction spot distribution on sample surface under different grating periods. (a) (10 lp/cm, 10 lp/cm); (b) (4 lp/cm, 10 lp/cm); (c) (4 lp/cm, 4 lp/cm); (d) (10 lp/cm, 4 lp/cm)$

Fig. 10. Diffraction spot distribution on sample surface under different grating periods. (a) (10 lp/cm, 10 lp/cm); (b) (4 lp/cm, 10 lp/cm); (c) (4 lp/cm, 4 lp/cm); (d) (10 lp/cm, 4 lp/cm)

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$MTF curves of diffraction spots at different orders on the surface of the sample. (a) (-1st, +1st); (b) (0th, +1st); (c) (+1st, +1st); (d) (-1st, 0th); (e) (0th, 0th); (f) (+1st, 0th); (g) (-1st, -1st); (h) (0th, -1st); (i) (+1st, -1st)$

Fig. 11. MTF curves of diffraction spots at different orders on the surface of the sample. (a) (-1st, +1st); (b) (0th, +1st); (c) (+1st, +1st); (d) (-1st, 0th); (e) (0th, 0th); (f) (+1st, 0th); (g) (-1st, -1st); (h) (0th, -1st); (i) (+1st, -1st)

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Fig. 12. Structure and imaging quality evaluation diagrams of emission light path. (a) 3D layout of receiving lens group 5; (b) 3D layout of emission light path; (c) light trace diagram of receiving end; (d) Seidel diagram of emission light path

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$MTF curves of diffraction spots with different orders at the receiving end. (a) (-1st, +1st); (b) (0th, +1st); (c) (+1st, +1st); (d) (-1st, 0th); (e) (0th, 0th); (f) (+1st, 0th); (g) (-1st, -1st); (h) (0th, -1st); (i) (+1st, -1st)$

Fig. 13. MTF curves of diffraction spots with different orders at the receiving end. (a) (-1st, +1st); (b) (0th, +1st); (c) (+1st, +1st); (d) (-1st, 0th); (e) (0th, 0th); (f) (+1st, 0th); (g) (-1st, -1st); (h) (0th, -1st); (i) (+1st, -1st)

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Table 1. Initial structure parameters of objective lens

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Table 1. Initial structure parameters of objective lens

Number	r /mm	d /mm	Material
1	-10.000	3.029	N-LAK22
2	20.000	3.627	N-SF6HT
3	-20.000	2.850	—
4	425.000	3.979	N-LAK22
5	18.600	3.715	N-SF6HT
6	-27.000	2.000	—
7	30.369	1.586	N-BK7
8	289.138	0.500	—
9	9.436	3.160	N-BK7
10	76.000	0.500	—
11	15.000	4.000	N-BK7
12	7.500	3.623	—

Table 2. Optimized structure parameters of objective lens

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Table 2. Optimized structure parameters of objective lens

Number	r /mm	d /mm	Material
1	-7.656	5.418	N-LAK22
2	-17.293	4.901	N-SF6HT
3	-14.39	24.461	—
4	35.379	10.000	N-LAK22
5	40.319	5.482	N-SF6HT
6	-76.189	0.881	—
7	14.700	2.634	N-BK7
8	42.444	0.512	—
9	7.556	2.614	N-BK7
10	10.966	0.567	—
11	4.220	2.402	N-BK7
12	4.330	3.623	—

Table 3. Structural parameters of receiving lens
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Table 3. Structural parameters of receiving lens
Number r /mm d /mm Material
1 23.524 1.000 N-BK7
2 -14.287 2.000 —
3 -3.376 5.000 N-LAK22
4 -3.883 5.000 N-SF6HT
5 -9.065 3.427 —
6 11.616 1.221 N-BK7
7 -33.922 0.500 —
8 5.014 2.343 N-LAK22
9 -8.230 1.132 N-SF6HT
10 58.043 4.000 —

Table 4. Comparison of structur parameters for different scanning systems
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Table 4. Comparison of structur parameters for different scanning systems
Structure Resolution of line scanning system /μm Resolution of multi-point scanning system /μm
Objective lens 4.05 1.55
Illumination light path 4.08 1.56
Emission light path 5.82 2.15

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Yanwei Fu, Jiaqing Zeng, Wanzhuo Ma, Dongdong Han, Shaoqian Tian, Zhi Liu, Xianzhu Liu, Huilin Jiang. Design of a Multipoint Scanning Microscope Using Cascaded Flexible Gratings[J]. Acta Optica Sinica, 2024, 44(21): 2111002

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